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Material Removal and Deposition by Pulsed Laser Ablation and Associated Phenomena

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Pulsed Laser Ablation of Solids

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 53))

Abstract

This chapter starts with the presentation of some micro and nano requirements by describing some influences of the ambient gas and target material on the ablation process in general and on the ablation rate in particular. Ablation in liquids is also briefly presented as an alternative ablation technique. Nanoparticle formation from the ablation plume is further explained based on basic homogeneous condensation theory. In the last part the PLD process is presented through its basic components: ablation, plume propagation and particle deposition. Special attention is given to the plume propagation and filtering techniques. ‘Classical’ filtering techniques as axe-off, back-side and ‘eclipse’ techniques are described starting from the plume propagation. Also some more advanced multi-element masks and a more recent filtering technique based on the plume reflection developed by the authors are presented and described in this chapter.

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Authors and Affiliations

  1. Department of Physics, University Politehnica of Bucharest, Bucharest, Romania

    Mihai Stafe & Niculae N. Puscas

  2. Laser Department, National Institute for Laser Plasma and Radiation Physics, Bucharest-Magurele, Romania

    Aurelian Marcu

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  1. Mihai Stafe
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  2. Aurelian Marcu
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  3. Niculae N. Puscas
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Correspondence to Mihai Stafe .

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Stafe, M., Marcu, A., Puscas, N.N. (2014). Material Removal and Deposition by Pulsed Laser Ablation and Associated Phenomena. In: Pulsed Laser Ablation of Solids. Springer Series in Surface Sciences, vol 53. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40978-3_5

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  • DOI: https://doi.org/10.1007/978-3-642-40978-3_5

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