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Lasers for Pulsed Laser Ablation

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Pulsed Laser Ablation of Solids

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 53))

Abstract

In this chapter, several lasers (e.g. Nd-YAG laser, Ti-sapphire laser, excimer laser, \(\text {CO}_{2}\) laser) are analysed because they are versatile sources of energy in a highly concentrated form, being attractive tools and research instruments for a large variety of research and production fields, and for laser ablation in particular. We present the fundamentals on the operation modes of these lasers (pulsed, CW, tunable), pulse duration (nano, pico, femtosecond range), power and operation wavelength (from near UV to far IR range), emphasizing their best capabilities. As current technology is pushed to ever smaller dimensions, lasers become a truly enabling solution, reducing thermomechanical damage and facilitating heterogeneous integration of components into functional devices. Also, the Q-switched and mode locked lasers are analysed together with the most used methods for their practical operation: mechanical, electro-optical, acousto-optical, methods with saturable absorbers and thin films etc. The knowledge of the laser operation and the parameters is used to control PLA process for different types of solid materials in different ambient conditions. At the end of this chapter several combined irradiation methods (exposure to intense surface plasmon optical near field, the 3D laser lithography etc.) and some effects of pulse duration on the ablation rate are discussed together the projection through microlens array and laser trepanning.

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Authors and Affiliations

  1. Department of Physics, University Politehnica of Bucharest, Bucharest, Romania

    Mihai Stafe & Niculae N. Puscas

  2. Laser Department, National Institute for Laser Plasma and Radiation Physics, Bucharest-Magurele, Romania

    Aurelian Marcu

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  1. Mihai Stafe
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  2. Aurelian Marcu
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  3. Niculae N. Puscas
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Correspondence to Mihai Stafe .

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Stafe, M., Marcu, A., Puscas, N.N. (2014). Lasers for Pulsed Laser Ablation. In: Pulsed Laser Ablation of Solids. Springer Series in Surface Sciences, vol 53. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40978-3_2

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  • DOI: https://doi.org/10.1007/978-3-642-40978-3_2

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