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Laser Micro-/Nanofabrication and Applications Based on Multiphoton Process

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Novel Optical Technologies for Nanofabrication

Part of the book series: Nanostructure Science and Technology ((NST))

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Abstract

Laser multiphoton micro-/nanofabrication, a promising technique for fabricating diverse microstructures owing to its unique three-dimensional (3D) processing capability, arbitrary designability, and high fabricating accuracy, has been widely employed in the development of micro/nanodevices and micro/nanoelectromechanical systems (MEMS/NEMS). There have been many studies that aimed at improving the spatial resolution, fabrication efficiency, as well as the rule and photochemical strategies of two-photon polymerization. Herein, we describe the basic principle of the nonlinear optical effect, multiphoton absorption, and related materials that designed for multiphoton nanofabrication to overcome the optical diffraction limit and achieve spatial resolution at nanometric scale. Consequently, we generally introduce the methods, typical optical setup, and scanning modes of multiphoton micro-/nanofabrication. After figuring out the latest progress of improvement of spatial resolution with femtosecond laser direct writing technique based on multiphoton lithography, we highlight the 3D micro-/nanostructures fabrication with functional materials, such as the hydrogel and biocompatible materials, photoresists, inorganic–organic polymers, and hybrid polymers containing metal ions. Finally, we present the applications of multiphoton micro-/nanofabrication in micro-/nanodevices and MEMS/NEMS, which have the potential to make major leaps in a broad range of applications in the future.

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Authors and Affiliations

  1. National Center for Nanoscience and Technology, Beijing, China, People’s Republic

    Qian Liu

  2. Technical Institute of Physics and Chemistry Chinese Academy of Sciences, Beijing, China, People’s Republic

    Xuanming Duan

  3. Institute of Information Optical Engineering, Soochow University, Suzhou, China, People’s Republic

    Changsi Peng

Authors
  1. Qian Liu
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  2. Xuanming Duan
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  3. Changsi Peng
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© 2014 Springer-Verlag Berlin Heidelberg

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Liu, Q., Duan, X., Peng, C. (2014). Laser Micro-/Nanofabrication and Applications Based on Multiphoton Process. In: Novel Optical Technologies for Nanofabrication. Nanostructure Science and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40387-3_4

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