Abstract
In electrostatic-mechanical systems, the structure is subject both to rigid motions and elastic deformations by means of the electrostatic force.
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References
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Kaltenbacher, M. (2015). Coupled Electrostatic-Mechanical Systems. In: Numerical Simulation of Mechatronic Sensors and Actuators. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40170-1_10
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DOI: https://doi.org/10.1007/978-3-642-40170-1_10
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