Abstract
Cleanroom is the most important and most representative measure to create the clean microenvironment with air cleaning technology. The principle of cleanroom is the theoretical base for the design, operation, and maintenance of the cleanroom well.
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Xu, Z. (2014). Principle of Cleanroom. In: Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_8
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DOI: https://doi.org/10.1007/978-3-642-39374-7_8
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