Skip to main content
  • 1905 Accesses

Abstract

Under the guidance of the sampling theory, correct sampling procedures are taken, after which measurement can be performed with a variety of methods to determine the particle size, number, and distribution. After scientific evaluation is made on the measurement results, the correct conclusion can be finalized. This chapter will focus on the introduction of the principle of measurement and evaluation for particle concentration, filter, and cleanroom.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Gu WZ (1980) Determination of the measuring capacity of the particle counter for 0.3 μm channel. Contam Control Air-Condit Technol 2:29–34 (In Chinese)

    Google Scholar 

  2. Wu ZY (1984) Discussion on the sensitivity adjustment for the particle counter. Institute of HVAC of China Academy of Building Science Research, Beijing (In Chinese)

    Google Scholar 

  3. Zhao RY, Xu WQ, Qian BN (1987) Particle counting error of the optical particle counter. Tsinghua University, Beijing (In Chinese)

    Google Scholar 

  4. Xu ZL, Shen JM, Chen CY, Zhang YZ, Zhang YG (2000) Aerosol sampling error about a particle counter. China Powder Sci Technol 6(1):15–19 (In Chinese)

    Google Scholar 

  5. Peck RD (1989) The proposed revision of Federal Standard 209B (trans: Tian Zhikun). In: Collected works on design, construction and acceptance inspection of cleanroom, pp 274–277 (In Chinese)

    Google Scholar 

  6. Zhao RY, Qian BN, Xu WQ (1987) Dilution and measurement of high concentration aerosol. Tsinghua University, Beijing (In Chinese)

    Google Scholar 

  7. No. 2 Design Research Institute of China National Nuclear Corporation, etc., Comparison of filtration performance with NaCl, DOP and atmospheric dust (exchange material, the data is missing) (In Chinese)

    Google Scholar 

  8. Wu ZY (1980) Generation of standard monodisperse aerosol. Contam Control Air-Condit Technol 2:35–38 (In Chinese)

    Google Scholar 

  9. JIS Draft Template (1975) Light scattering particle counter. J Jpn Air Clean Assoc 13(2):48–53 (In Japanese)

    Google Scholar 

  10. Ventilation Committee and Subcommittee on Dust Measurement Method (1975) Measurement method of airborne particles in buildings (2). GA JAPAN 90(1098):849–866 (In Japanese)

    Google Scholar 

  11. Xu ZL, Shen JM (1989) Application of air cleaning technology. China Architecture & Building Press, Beijing, pp 396–398 (In Chinese)

    Google Scholar 

  12. Yamazaki S (1979) Measurement method of airborne bacteria. J Jpn Air Clean Assoc 17(7):26–33 (In Japanese)

    Google Scholar 

  13. Sugawara F, Yoshizawa S (1975) Study on microbial contamination indoors (1). Proc Jpn Build Instit 233:133–142 (In (In Japanese)

    Google Scholar 

  14. Institute of HVAC at China Academy of Building Research (1975) Two kinds of 300 type protective air filter. J HV&AC 1:23–35 (In Chinese)

    Google Scholar 

  15. JACA No.30-1994 (1994) Guideline for the generation method of aerosol used for contamination control. J Jpn Air Clean Assoc 32(2):60–82 (In Japanese)

    Google Scholar 

  16. Suemori T, IES-RP-CC001 (1994) 3 HEPA and ULPA filter. J Jpn Air Clean Assoc 32(1):57–68 (In Japanese)

    Google Scholar 

  17. Irie T, Mitsui Y, Saiki A (1992) Comment on volatilization quantity of DOP from filter media of HEPA filter. J Jpn Air Clean Assoc 30(1):13–19 (In Japanese)

    Google Scholar 

  18. Tu GB, Zhang SF (1990) Relationship between the filtration efficiency of microbe and particle for fibrous filter media. Contam Control Air-Condit Technol 2:20–21 (In Chinese)

    Google Scholar 

  19. Dorman RG (1968) European and American methods of testing air conditioning filters. Filtr Sep 1:24–28

    Google Scholar 

  20. Xu ZL (1995) Conversion method between particle counting efficiency and arrestance using atmospheric dust. Contam Control Air-Condit Technol 1:16–20 (In Chinese)

    Google Scholar 

  21. Yoshida F et al (1971) Study on the field test method of HEPA filter. J Jpn Air Clean Assoc 8(7):54–65 (In Japanese)

    Google Scholar 

  22. Ji JW (1980) Precipitators. China Architecture & Building Press, Beijing (In Chinese)

    Google Scholar 

  23. Noso M (1973) The latest electrical dust collection device. Therm Manag Pollut 25(7):51–63 (In Japanese)

    Google Scholar 

  24. Linder P (1970) Air filters for use at nuclear facilities, International Atomic Energy Agency. Technical Reports Series, No. 122

    Google Scholar 

  25. Morkowski J (1972) Messtechnische Bewertung reiner räume. Schweizerische Blätter für Heizung und Lüftung 39:2 (In German)

    Google Scholar 

  26. Takizawa S (1994) Air filter in the pharmaceutical industry. J Jpn Air Clean Assoc 32(2):28–38 (In Japanese)

    Google Scholar 

  27. Xu ZL, Cao GQ, Feng X et al (2010) A theoretical analysis of atmospheric dust aerosol method for leak testing HEPA/ULPA filters installed in cleanroooms – Part 9 of the Series of research practice of the National Standard Task Group for the code for cleanroom construction and acceptance test. Build Sci 26(1):1–6 (In Chinese)

    Google Scholar 

  28. Xu ZL, Cao GQ, Feng X, Zhang YZ (2010) A novel qualitative leak scan test method for installed HEPA/ULPA filters used in China. In: Proceedings of 2010 International Symposium on Contamination Control, Tokyo, p 457

    Google Scholar 

  29. Cao GQ, Xu ZL, Zhang YZ et al (2008) Air tightness measuring method for cleanroom: Part 8 of the series of research practice of the national standard task group for the code for cleanroom construction and acceptance test. J HV&AC 38(11):1–6 (In Chinese)

    Google Scholar 

  30. Shen JM (1982) Discussion of the airflow visualization with bubble. Contam Control Air-Condit Technol 3:57–61 (In Chinese)

    Google Scholar 

  31. Philip WM (1973) Environmental control in electronic manufacturing, pp 278 –292

    Google Scholar 

  32. Xu ZL, Feng X, Zhang YZ et al (2008) Discussion of definition of cleanroom occupation status: Part 2 of the series of research practice of the national standard task group for the code for cleanroom construction and acceptance test. J HV&AC 38(2):1–4 (In Chinese)

    Google Scholar 

  33. Xu ZL (1980) Calculation of the necessary sampling points in cleanroom. Contam Control Air-Condit Technol 1:25–28 (In Chinese)

    Google Scholar 

  34. Cooper DW (1989) Rationale for Proposed Revisions to Federal Standard 209B (Cleanrooms) (trans: Liu Xianzhe, Zhan Yingmin). In: Collected works on design, construction and acceptance inspection of cleanroom, pp 278–286 (In Chinese)

    Google Scholar 

  35. Fan CY, Wang HP (1995) Air cleanliness level standard for cleanroom. J HV&AC 25(3):8–12 (In Chinese)

    Google Scholar 

  36. Feng HM (1997) Influence of the printer of the particle counter on the measurement results. Contam Control Air-Condit Technol 1:21–33 (In Chinese)

    Google Scholar 

  37. Zeng QC (1982) Technical mathematical statistics. Anhui Science & Technology Publishing House, Hefei, pp 71–73 (In Chinese)

    Google Scholar 

  38. Xu ZL (1980) Problem about the dynamic to static ratio of particle concentration in cleanroom. J HV&AC 3:16–19 (In Chinese)

    Google Scholar 

  39. Tanaka K (1972) Indoor air pollution and its countermeasures. J Jpn Air Clean Assoc 1:10–23 (In Japanese)

    Google Scholar 

  40. Xu ZL (1980) Evaluation standard and method for cleanroom. J HV&AC 2:27–29 (In Chinese)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Xu, Z. (2014). Measurement and Evaluation. In: Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_17

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-39374-7_17

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-39373-0

  • Online ISBN: 978-3-642-39374-7

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics