Abstract
On the basis of research on CTC (Cluster Tool Controller) software framework and SEMI (Semiconductor Equipment and Materials International) standard, the real-time scheduling system model of CTC, which consists of supervisory control level and module management level, is proposed. The supervisory control level is an abstract one, and is in charge of controlling schedule logic. According to principle of separating logical and function, a scheduling control logical model based on Extended Finite State Machine is proposed, as well as its control procedure under normal and exception conditions. In level of model management, task is breakdown in accordance with SEMI CTMC standard. At last, by analysis of test and verification of real-time scheduling system, the proposed model is verified using the idea of “virtual control”.
Supported by Program for Liaoning Excellent Talents in University (LJQ2011132).
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Hong SB, Lee DY, Yoon HJ (2001) Semiconductor track system simulator. In: Proceeding of the IEEE international conference on systems, man, and cybernetics, pp 1036–1040
Huang HP, Hsiao ZY (2002) Development of remote control system of a semiconductor cluster tool. In: Proceeding of the IEEE international conference on systems, man, and cybernetics, pp 6–9
Kim WS, Jeon YH, Kwak SJ et al (2009) High-fidelity simulation of integrated single-wafer processing tools for evaluation of scheduling algorithms. Robot Comput Integr Manuf 25(1):107–121
Lee JH, Lee TE (2004) A supervisory equipment control application model for integrated semiconductor manufacturing equipment. IEEE Robot Autom Mag 11(1):41–58
Li LY, Hu JT (2010) K wafer cycle sequence problem in multi-cluster tools scheduling. Comput Integr Manuf Syst 16(1):109–115
Liu Y, Yang JH (2008) Content oriented finite state based network service model. Acta Electronica Sinica 36(10):1897–1902
Liu P, Miao HK, Zeng HW, Mei J (2011) DFSM-based minimum test cost transition coverage criterion. J Softw 22(7):1457–1474
Shi ZF, Yao SY, Ding SC et al (2008) Bus interface protocol testbench based on extended finite state machine and assertion. J Tianjin Univ 41(8):951–956
Shin YH, Lee TE, Kim JH et al (2001) Modeling and implementing a real-time scheduler for dual-armed cluster tools. Comput Ind 45(1):13–27
Shun WT, Liu YX, Zhang Y, Zhang TC (2007) Application of FSM to open CNC. J Northeast Univ 28(8):1174–1177
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Lu, R., Li, Ly. (2013). Research on Framework Model of Real-Time Scheduling System for Cluster Tool Controller. In: Qi, E., Shen, J., Dou, R. (eds) International Asia Conference on Industrial Engineering and Management Innovation (IEMI2012) Proceedings. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-38445-5_30
Download citation
DOI: https://doi.org/10.1007/978-3-642-38445-5_30
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-38444-8
Online ISBN: 978-3-642-38445-5
eBook Packages: EngineeringEngineering (R0)