Abstract
Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of \(\frac{3}{2}\) and \(\frac{4}{3}\) for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.
This research was supported by OT Grant OT/07/015.
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Dokka, T., Bougeret, M., Boudet, V., Giroudeau, R., Spieksma, F.C.R. (2013). Approximation Algorithms for the Wafer to Wafer Integration Problem. In: Erlebach, T., Persiano, G. (eds) Approximation and Online Algorithms. WAOA 2012. Lecture Notes in Computer Science, vol 7846. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-38016-7_23
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DOI: https://doi.org/10.1007/978-3-642-38016-7_23
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-38015-0
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