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A Simulation-Based Analysis of Cluster Tools Scheduling with Plant Simulation

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The 19th International Conference on Industrial Engineering and Engineering Management

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Abstract

Cluster tools are configurable and integrated equipment. They are widely used in semiconductor fabrication in recent years. It is difficult to effectively operate a cluster tools and schedule it due to wafer residency time constraints and activity time variation of cluster tools. The schedule effects on the time performance of cluster tools operation. In this paper, a simulation model based on Plant simulation is presented to discuss the schedule of cluster tools in steady state. This simulation model could describe and simulate the activities of robot, wafer processing and their corresponding timing of cluster tools operation. Hence, it is a useful method to analyze the time performance of cluster tools such as scheduling. Two examples are used to test the simulation model and show the proposed application of the simulation model.

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Authors and Affiliations

  1. School of Electro-Mechanical Engineering, Guangdong University of Technology, Guangzhou, China

    Yan Min & Xiao-rui Lin

Authors
  1. Yan Min
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  2. Xiao-rui Lin
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Corresponding author

Correspondence to Yan Min .

Editor information

Editors and Affiliations

  1. Industrial Engineering Institution of CM, 92 Wenjin Road, Nankai District, Tianjin, 300072, China, People's Republic

    Ershi Qi

  2. Industrial Engineering Institution of CM, 92 Wenjin Road, Nankai District, Tianjin, 300072, China, People's Republic

    Jiang Shen

  3. , College of Management and Economics, Tianjin University, 92 Wenjin Road, Tianjin, 300072, China, People's Republic

    Runliang Dou

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Min, Y., Lin, Xr. (2013). A Simulation-Based Analysis of Cluster Tools Scheduling with Plant Simulation. In: Qi, E., Shen, J., Dou, R. (eds) The 19th International Conference on Industrial Engineering and Engineering Management. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-37270-4_7

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