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Microfabrication Techniques

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Giant Magnetoresistance (GMR) Sensors

Part of the book series: Smart Sensors, Measurement and Instrumentation ((SSMI,volume 6))

Abstract

GMR sensors are fabricated by following a sort of techniques in a similar fashion to those related to standard CMOS processes. Deposition, patterning and encapsulation steps are found in both parts. However, characteristics related to the specific materials involved in the GMR technology recommend the use of some particular techniques. In this chapter, we focus on these specific methods, while keeping in mind the interest in merging standard CMOS with GMR technologies.

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Authors and Affiliations

  1. INESC-Microsistemas e Nanotecnologias, Lisbon, Portugal

    Diana C. Leitão, José Pedro Amaral & Susana Cardoso

  2. University of Valencia, Valencia, Spain

    Càndid Reig

Authors
  1. Diana C. Leitão
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  2. José Pedro Amaral
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  3. Susana Cardoso
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  4. Càndid Reig
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Leitão, D.C., Amaral, J.P., Cardoso, S., Reig, C. (2013). Microfabrication Techniques. In: Giant Magnetoresistance (GMR) Sensors. Smart Sensors, Measurement and Instrumentation, vol 6. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-37172-1_2

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  • DOI: https://doi.org/10.1007/978-3-642-37172-1_2

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-37171-4

  • Online ISBN: 978-3-642-37172-1

  • eBook Packages: EngineeringEngineering (R0)

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