Fabrication of Ultrahigh-Density Self-assembled InAs Quantum Dots by Strain Compensation

Part of the Nano-Optics and Nanophotonics book series (NON)


A fabrication method of semiconductor quantum dots (QDs), which is an important fundamental technology for realizing high-performance QD optical devices, is discussed in this chapter. In the first section, we introduce self-assembly of InAs QDs based on the Stranski-Krastanov growth mode. In the second section, we discuss the fabrication of ultrahigh-density QDs by a strain compensation technique. Finally, we present applications using the ultrahigh-density QDs, in particular, various unique properties of a highly stacked InAs QD laser diode.


Quantum Well Semiconductor Optical Amplifier Internal Quantum Efficiency Fiber Optic Communication System Strain Compensation 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  1. 1.National Institute of Information and Communications TechnologyKoganeiJapan

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