A Fuzzy Adaptive Fading Kalman Filter Approach for Accuracy Improvement of a Laser Interferometer
The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability.
KeywordsFuzzy adaptive fading Kalman filter laser interferometer accuracy fuzzy logic error compensation
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