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A Fuzzy Adaptive Fading Kalman Filter Approach for Accuracy Improvement of a Laser Interferometer

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Book cover Computer Applications for Security, Control and System Engineering

Part of the book series: Communications in Computer and Information Science ((CCIS,volume 339))

Abstract

The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability.

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Author information

Authors and Affiliations

  1. Department of Electrical Engineering, Sungkyunkwan University, Suwon, 440-746, Korea

    Pyeongjun Kim, Joohyun An & Kwanho You

Authors
  1. Pyeongjun Kim
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  2. Joohyun An
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  3. Kwanho You
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Editor information

Editors and Affiliations

  1. GVSA and University of Tasmania, 20 Virginia Court, Hobart, TAS, Australia

    Tai-hoon Kim

  2. Jet Propulsion Laboratory/Caltech, NASA, 4800 Oak Grove Drive, 91109, Pasadena, CA, USA

    Adrian Stoica

  3. National Chiao Tung University, Hsinchu, Taiwan, R.O.C.

    Wai-chi Fang

  4. University of Western Macedonia, Kozani, Greece

    Thanos Vasilakos

  5. Universidad Complutense de Madrid, 28040, Madrid, Spain

    Javier García Villalba

  6. Mississippi State University, Mississippi State, MS, USA

    Kirk P. Arnett

  7. King Saud University, Riyadh, Kingdom of Saudi Arabia

    Muhammad Khurram Khan

  8. School of Computing and Information System, University of Tasmania, Churchill Avenue, Sandy Bay, Hobart, TAS, Australia

    Byeong-Ho Kang

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© 2012 Springer-Verlag Berlin Heidelberg

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Cite this paper

Kim, P., An, J., You, K. (2012). A Fuzzy Adaptive Fading Kalman Filter Approach for Accuracy Improvement of a Laser Interferometer. In: Kim, Th., et al. Computer Applications for Security, Control and System Engineering. Communications in Computer and Information Science, vol 339. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-35264-5_33

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  • DOI: https://doi.org/10.1007/978-3-642-35264-5_33

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-35263-8

  • Online ISBN: 978-3-642-35264-5

  • eBook Packages: Computer ScienceComputer Science (R0)

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