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Stamp Fabrication

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Book cover Nanoimprint Lithography: An Enabling Process for Nanofabrication

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Abstract

Nanoimprint lithography is a replication technique in essence, which can copy a master geometry. The master, also known as the template, the stamp, or the mold, is different from a mask for photolithography. The template material and geometrical parameters directly affect the template deformation and the quality of transfer pattern. Alignment accuracy is determined by the mark pattern on the master; also, the pattern transfer resolution is affected by the master geometry. Therefore, the production of high-quality, high-precision imprint template is a key issue. Besides, evaluation and repair for nanoimprint mold are increasingly becoming a focus. The aforementioned issue is a bottleneck for nanoimprint lithography process. Therefore, research on the stamp must be distinctly elucidated. There are three types of molds: hard mold, soft mold, and rigiflex mold. Silicon, quartz, or metals are used for hard mold, whereas polymers are typically used for soft and rigiflex molds. There are many methods for stamp fabrication, which have conventional and unconventional techniques. In the chapter, stamp materials, stamp fabrication, and evaluation of mold have been introduced.

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Authors and Affiliations

  1. Shanghai Nanotechnology Promotion Center, Shanghai, People’s Republic of China

    Weimin Zhou

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  1. Weimin Zhou
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Zhou, W. (2013). Stamp Fabrication. In: Nanoimprint Lithography: An Enabling Process for Nanofabrication. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-34428-2_3

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  • DOI: https://doi.org/10.1007/978-3-642-34428-2_3

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-34427-5

  • Online ISBN: 978-3-642-34428-2

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