Abstract
MgTiO3 (MTO) thin films have been deposited on to SiO2 substrates at ambient temperature by RF magnetron sputtering at different oxygen mixing percentage (OMP). The MTO target has been synthesized by mechanochemical synthesis method and sintered at 1,350 °C for 3 h. The phase purity of the sputtering target was confirmed from X-ray diffraction pattern and it could be refined to \( R\bar{3} \) space group with lattice parameters a = b = 5.0557(12) Å, c = 13.9003(9) Å. The effect of annealing on crystal structure, and optical properties of MTO thin films studied systematically. The as deposited films were X-ray amorphous irrespective of the processing parameters and exhibit refractive index in the range of 1.84–1.97 at 600 nm with an optical absorption edge value in between 3.72 and 3.78 eV. On annealing at 700 °C for 1 h, the films were polycrystalline accompanied by an increase in refractive index and band gap and decrease in transmittance. The increase in the refractive index and band gap on annealing can be attributed to the improvement in packing density and crystallinity decrease in porosity ratio.
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References
T. Takada, S.F. Wang, S. Yoshikawa, S.J. Yang, R.E. Newnham, Effect of glass additives on BaO-TiO2-WO3 microwave ceramics. J. Am. Ceram. Soc. 77, 1994 (1994)
R.J. Cava, W.F. Peck Jr, J.J. Krajewski, G.L. Reberts, B.P. Barber, Improvement of the dielectric properties of Ta2O5 through substitution with Al2O3. Appl. Phys. Lett. 70, 1396 (1997)
V.M. Ferreira, J.L. Baptista, Role of niobium in magnesium titanate microwave dielectric ceramics. J. Am. Ceram. Soc. 79, 1697 (1996)
S. Nishigaki, H. Kato, S. Yano, R. Kamimure, Microwave dielectric properties of (Ba, Sr)O-Sm2O3-TiO2 ceramics. Am. Ceram. Soc. Bull. 66, 1405 (1987)
V.M. Ferreira, J.L. Baptista, S. Kamaba, J. Petzdt, Dielectric spectroscopy of MgTiO3-based ceramics in the 109–1014 Hz region. J. Mater. Sci. 28, 5894 (1993)
N. Ichinose, H. Yamamoto, Effect of additives on microwave dielectric properties in low-temperature sintering (Mg, Ca)TiO3 based ceramics. Ferroelectrics 201, 255 (1997)
D. Pamu, K. Sudheendran, M. Ghanashyam krishna, K.C. James Raju, A.K. Bhatnagar, Ambient temperature stabilization of crystalline zirconia thin films deposited by dc magnetron sputtering. Thin Solid Films 517, 1587 (2009)
M. Ferraris, E. Verne, P. Appendino, C. Moisescu, A. Krejewski, A. Ravaglioli, A. Piancastelli, Coatings on zirconia for medical applications. Biomaterials 21, 765 (2000)
K. Suresh, J.K. Thomas, H. Sreemoolanadhan, C.N. George, A. John, S. Solomon, P.R.S. Wariar, J. Koshy, Synthesis of nanocrystalline magnesium titanate by an auto-igniting combustion technique and its structural, spectroscopic and dielectric properties. Mater. Res. Bull. 45, 761 (2010)
J.H. Sohn, Y. Inaguma, S.O. Yoon, M. Itoh, T. Nakumura, S.J. Yoon, H.J. Kim, Microwave dielectric characteristics of ilmenute-type titanates with high Q values. Jpn. J. Appl. Phys. 33, 5466 (1994)
B.D. Lee, H.R. Lee, K.H. Yoon, Y.S. Cho, Microwave dielectric properties of magnesium calcium titanate thin films. Ceram. Int. 31, 143 (2005)
Y.B. Chen, C.L. Haung, Effects of O2/Ar mixing and annealing on the properties of MgTiO3 films prepared by RF magnetron sputtering. Surf. Coat. Technol. 201, 654 (2009)
R.A. Young, The Rietveld Method, International Union of Crystallography, (Oxford University Press, London, 1996)
R. Swanpoel, Determination of the thickness and optical constants of amorphous silicon. J. Phys. E: Sci. Instrum. 16, 1214 (1983)
H.M. Rietveld, A profile refinement method for nuclear and magnetic structures. J. Appl. Crystallography 2, 65 (1969)
E.A.V. Ferri, J.C. Sczancoski, L.S. Cavalcante, E.C. Paris, J.W.M. Espinosa, A.T. de Figueiredo, P.S. Pizani, V.R. Mastelaro, J.A. Varela, E. Longo, Photoluminescence behavior in MgTiO3 powders with vacancy/distorted clusters and octahedral tilting. Mater. Chem. Phys. 117, 192 (2009)
R. Jacobson, Inhomogeneous and co-evaporated homogeneous films for optical applications. Phys. Thin films 8, 51 (1975)
Q. Ye, P.Y. Liu, Z.F. Tang, L. Zhai, Hydrophilic properties of nano-TiO2 thin films deposited by RF magnetron sputtering. Vaccum 81, 627 (2007)
J. Lee, C.W. Choi, sol- gel derived epitaxial MgTiO3 thin films. Jpn. J. Appl. Phys. 38, 3651 (1999)
P. Li, J.F. McDonald, T.M. Lu, Densification induced dielectric properties change in amorphous BaTiO3 thin films. J. Appl. Phys. 71, 5596 (1992)
J.C. Tauc, Optical Properties of Solids, (Amesterdam, North-Holland, 1972)
V.M. Longo, A.T. de Figueiredo, S. de Lázaro, M.F. Gurgel, M.G.S. Costa, C.O. Paiva-Santos, J.A. Varela, E. Longo, V.R. Mastelaro, F.S. de Vicente, A.C. Hernandes, R.W.A. Franco, Structural conditions that leads to photoluminescence emission in SrTiO3: An experimental and theoretical approach. J. Appl. Phys. 104, 023515 (2008)
D. Pamu, M. Ghanashyam Krishna, K.C. James Raju, A.K. Bhatnagar, Ambient temperature growth of nanocrystalline titanium dioxide thin films. Solid State Commun. 135, 7 (2005)
Acknowledgments
The Authors acknowledges the financial support from DRDO and BRNS. Author acknowledges Dr. Biswanath Samantaray for Rietvied refinement analysis. XRD facility supported by DST, New Delhi, under FIST program (Ref. No: SR/FST/PSII-020/2009) is acknowledged.
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Kumar, T.S., Bhuyan, R.K., Perumal, A., Pamu, D. (2013). Effect of Process Parameters and Post Annealing Temperature on Structural and Optical Properties of MgTiO3 Thin Films Deposited by RF Magnetron Sputtering. In: Giri, P.K., Goswami, D.K., Perumal, A. (eds) Advanced Nanomaterials and Nanotechnology. Springer Proceedings in Physics, vol 143. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-34216-5_30
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DOI: https://doi.org/10.1007/978-3-642-34216-5_30
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