Abstract
Measurements of the form and the roughness during the machining process or the replication process with molds is still difficult and highly inaccurate. An adequate roughness measuring system is based on the analysis of the scattered speckle intensity distribution, emerging from the workpiece surface. This contribution covers the theoretical description of the scattered light measuring process, which is based on the scalar Kirchhoff theory and a ray tracing model of the light propagation in an optical fiber considering physical optics.
Highest accuracy in optical, non tactile measurement of form deviations of molds or the molded optics in the machine is achieved by interferometry. A phase shifting digital holographic measurement method is described in more detail. This comprises an automated alignment set-up including the features of auto focusing and subsequent refocusing, the use of computer generated holograms (CGHs) as well as different approaches for a systematic determination and evaluation of form deviations.
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Goch, G., Schmitt, R., Patzelt, S., Stürwald, S., Tausendfreund, A. (2013). In-situ and In-process Metrology for Optical Surfaces. In: Brinksmeier, E., Riemer, O., Gläbe, R. (eds) Fabrication of Complex Optical Components. Lecture Notes in Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33001-8_11
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DOI: https://doi.org/10.1007/978-3-642-33001-8_11
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