Abstract
Growth requires some deviation from thermodynamic equilibrium. This chapter outlines the driving force for equilibrium-near growth of a crystal in terms of macroscopic quantities. We consider a thermodynamic description for the transition of a gaseous or liquid phase to the solid phase. The initial stage of layer growth requires a nucleation process. We discuss the energy of a surface and illustrate the nucleation of a layer and the occurrence of different growth modes.
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Pohl, U.W. (2013). Thermodynamics of Epitaxial Layer-Growth. In: Epitaxy of Semiconductors. Graduate Texts in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-32970-8_4
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DOI: https://doi.org/10.1007/978-3-642-32970-8_4
Publisher Name: Springer, Berlin, Heidelberg
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