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Multilayer Integrated Film Bulk Acoustic Resonators pp 125–149Cite as

High Sensitive Sensors Based on FBAR

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Abstract

The successes in the field of FBAR based filters motivate the researchers to explore its application in biochemical sensors. As a microbalance sensor, the FBAR working in 2–5 GHz offers a potential sensitivity increase of more than three orders of magnitude over QCM typically working in several MHz. In addition, other advantages of FBAR include its small size and IC-compatibility, which makes FBAR possible to be assembled to sensor arrays integrated with the electronics, and hence low cost mass production of miniature sensor system. In this chapter, the principle of the mass loading sensors, including QCM and FBAR, are introduced. A CNTs coated FBAR gas sensor is realized. The related researches show that the sensitivity of FBAR sensor has achieved the magnitude of nanogram, and have the potential of further development to the magnitude of picogram.

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Authors and Affiliations

  1. Research Institute of Micro/Nano, Science & Technology, Shanghai Jiao Tong University, Shanghai, China, People’s Republic

    Dr. Yafei Zhang

  2. Qingdao Key Laboratory of Terahertz Technology, Shandong University of Science and Technology, Qingdao, China, People’s Republic

    Dr. Da Chen

Authors
  1. Dr. Yafei Zhang
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  2. Dr. Da Chen
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© 2013 Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg

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Zhang, Y., Chen, D. (2013). High Sensitive Sensors Based on FBAR. In: Multilayer Integrated Film Bulk Acoustic Resonators. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31776-7_9

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  • DOI: https://doi.org/10.1007/978-3-642-31776-7_9

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-31775-0

  • Online ISBN: 978-3-642-31776-7

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