Abstract
FBAR is composed of piezoelectric film, electrodes and supporting layer or Bragg acoustic reflector. The performance of FBAR depends on the acoustic and electric properties of the materials. Based on the acoustic theory, we can deduce the plane-wave-propagating characteristics of the general elastic films and piezoelectric film in FBAR and then obtain the electric impedance of the device. In this chapter, the electric impedances of ideal and practical FBAR are deduced to present the resonance characteristics. In addition, the universal equivalent mode based on transmission line is obtained for calculating the performance of FBAR. Using this mode, the influences of the material parameters, electrodes and supporting layer were calculated.
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References
Rosenbaum, J.F.: Bulk Acoustic Wave Theory and Devices. Artech House, Boston (1992)
Chao, M.C., Huang, Z.N., Pao, S.Y., Wang, Z., Lam, C.S.: Modified BVD-equivalent circuit of FBAR by taking electrodes into account. Proc. IEEE Ultrasonics Symp. 1, 973–976 (2002)
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© 2013 Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg
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Zhang, Y., Chen, D. (2013). The Theory of FBAR. In: Multilayer Integrated Film Bulk Acoustic Resonators. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31776-7_3
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DOI: https://doi.org/10.1007/978-3-642-31776-7_3
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-31775-0
Online ISBN: 978-3-642-31776-7
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