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Mikrotechnologien

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Sensortechnik

Part of the book series: VDI-Buch ((VDI-BUCH))

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Zusammenfassung

Die Prozesse der Mikrotechnologien entstammen zum Großteil den Fertigungsmethoden der Mikroelektronik. Hinzu kommen verschiedene Sonderprozesse und Methoden, die speziell für die Herstellung von Mikrosensoren und Mikroaktoren entwickelt wurden. Weil diese Prozesse in der Regel eine besonders reine Arbeitsumgebung erfordern, wird am Anfang dieses Kapitels zunächst auf die grundsätzlichen Anforderungen an Reinräume eingegangen. Es werden dann die wichtigsten Prozesse der Siliziumtechnologie, der Mikromechanik, der Schichttechniken, der Verbindungs- und Kontaktiertechniken und der LIGA-Technik behandelt. Diese Ausführungen können im Rahmen dieses Handbuches naturgemäß nur in Form einer Übersicht erfolgen. Ausführliche Darstellungen dazu finden sich in der einschlägigen Spezialliteratur am Ende dieses Kapitels.

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Authors and Affiliations

  1. Institut für Mikrosystemtechnik IMTEK, Albert-Ludwigs-Universität Freiburg, Georges-Köhler-Allee 103, Freiburg, 79110, Deutschland

    Holger Reinecke & Claas Müller

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  1. Holger Reinecke
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  2. Claas Müller
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Correspondence to Holger Reinecke .

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Editors and Affiliations

  1. Fakultät für Elektrotechnik, Institut für Elektrische Meßtechnik, Universität der Bundeswehr München, Neubiberg, Deutschland

    Hans-Rolf Tränkler

  2. Institut für Mikrosystemtechnik – IMTEK, Lehrstuhl für Elektrische Mess- und Prüfverfahren, Universität Freiburg, Freiburg, Deutschland

    Leo Reindl

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Reinecke, H., Müller, C. (2014). Mikrotechnologien. In: Tränkler, HR., Reindl, L. (eds) Sensortechnik. VDI-Buch. Springer Vieweg, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-29942-1_6

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