Abstract
High-κ dielectrics are intensively studied nowadays, because of their use as gate dielectrics in MOS capacitors and especially in DRAMs, is implicated by technology roadmaps. Their electrical characterization in terms of capacitance measurements is common practice for determination of parameters, reliability behaviour and for modelling the performance of devices. In our case, for measurements we use Visual Engineering Environment Programming (VEE Pro) software, a graphical dataflow programming software environment from Agilent Technologies for automated test, measurement, data analysis and reporting. VEE Pro interface is very suitable for simultaneous and succesive measurements of different parameters, that need swiching on/off various instruments and devices involved in the measurement. The obtained data were graphicaly represented and analyzed with OriginPro 8.1, data analysis and graphing software. For calculation of the value of capacitance in accumulation C acc Kar’s method for extraction is used, and then the flatband voltage V FB and fixed oxide charge Q ox are calculated.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Chau, R.: Advanced Metal Gate/High-k Dielectric Stacks for High-Performance CMOS Transistors. In: American Vacuum Society 5th International Conference on Microelectronics and Interfaces, Santa Clara, California, pp. 1–3 (2004)
Choi, R., et al.: Fabrication of high quality ultra-thin HfO2 gate dielectric MOSFETs using deuterium anneal International Electron Devices Meeting. In: IEDM 2002. Digest, pp. 613–616 (2002)
Lucovsky, G., Rayner, B., Zhang, Y., Whitten, J.: Experimental determination of band offset energies between Zr silicate alloy dielectrics and crystalline Si substrates by XAS, XPS and AES and ab initio theory: a new approach to the compositional dependence of direct tunneling currents. In: International Electron Devices Meeting, IEDM 2002. Digest, pp. 617–620 (2002)
Inumiya, S., et al.: Fabrication of HfSiON gate dielectrics by plasma oxidation and nitridation, optimized for 65 nm mode low power CMOS applications. In: Symposium on VLSI Technology, Digest of Technical Papers, pp. 17–18 (2003)
Atanassova, E., Paskaleva, A.: Challenges of Ta2O5 as high-k dielectric for nanoscale DRAMs. Microelectron Reliab. 47, 913–923 (2007)
Atanassova, E., Paskaleva, A.: The effect of the metal electrode on the electrical characteristics of Ta2O5 capacitors for DRAM applications. In: Duenas, S., Castan, H. (eds.) New Materials and Processes for Incoming Semiconductor Technologies, pp. 77–111. Transworld Research Network, Kerala (2006)
Novkovski, N.: Conduction and charge analysis of metal (Al, W and Au)-Ta2O5/SiO2-Si structures. Semicond. Sci. Technol. 21, 945–951 (2006)
Novkovski, N.: The use of the visual programming language HP VEE in data acquisition and processing. In: SEFI WGP Seminar EMEPE 1998, Brno, Czech Republic, pp. 78–81 (1998)
VEE Pro User’s guide – Agilent Technologies, http://cp.literature.agilent.com/
Srivastava, V.M., Singh, G., Yadav, K.S.: Application of VEE Pro Software for Measurement of MOS Device Prameters using C-V curve. International Journal of Computer Applications 1, 43–46 (2010)
Novkovski, N., Atanassova, E.: A comprehensive model for the I-V characteristics of metal Ta2O5/SiO2-Si structures. Appl. Phys. A 83, 435–445 (2006)
Novkovski, N., Atanassova, E.: Origin of the stress-induced leakage currents in Al-Ta2O5/SiO2-Si structures. Appl. Phys. Lett. 86, 152104 (2005)
Kar, S.: Extraction of the capacitance of ultrathin high-k gate dielectrics. IEEE Trans. Electron. Dev. 50, 2112–2119 (2003)
Stojanovska-Georgievska, L., Atanassova, E., Novkovski, N.: Alteration of C-V characteristics of metal-Ta2O5-Si capacitors by constant voltage stress. Physica Macedonica 58, 107–112 (2008)
Sze, S.M.: Physics of Semiconductor Devices, 2nd edn. Wiley, New York (1985)
Nicollian, E.H., Brews, J.R.: MOS Physics and Technology. Wiley, New York (1982)
Stojanovska-Georgievska, L., Novkovski, N., Atanassova, E.: Study on the frequency dependence of C-V measurements of unstressed HfO2-Ta2O5 stacks. Physica Macedonica (2010) (in press)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2012 Springer-Verlag GmbH Berlin Heidelberg
About this paper
Cite this paper
Stojanovska-Georgievska, L., Novkovski, N. (2012). Computer-Added C-V Measurement and Analysis of Metal/High-κ/Si Structures. In: Kocarev, L. (eds) ICT Innovations 2011. ICT Innovations 2011. Advances in Intelligent and Soft Computing, vol 150. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-28664-3_28
Download citation
DOI: https://doi.org/10.1007/978-3-642-28664-3_28
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-28663-6
Online ISBN: 978-3-642-28664-3
eBook Packages: EngineeringEngineering (R0)