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Bio and Nano Packaging Techniques for Electron Devices pp 119–137Cite as

Uncertainty-Based Design Optimization of MEMS/NEMS

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Abstract

In designing micro-electromechanical systems (MEMS), model-based design and design optimization is inevitable. This is due to the complexity of the working principles and the manufacturing technology associated with high initial costs for experimental investigations. Uncertainty-based design optimization enables stochastic variables, such as scattering material properties, manufacturing tolerances, stochastic time dependent loads, aging, or wear, to be considered in the design. In this chapter, the fundamental concept of reliability or failure probability is introduced and probabilistic approximation and simulation methods are described. These methods are used for robust design optimization (RDO) and reliability-based design optimization (RBDO) as well. Applications and examples for of both approaches are also provided.

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Authors and Affiliations

  1. Institute of Electromechanical and Electronic Design, Technische Universität Dresden, 01062, Dresden, Germany

    Holger Neubert

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  1. Holger Neubert
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  1. Fak. Elektrotechnik, Inst. Festkörperelektronik, TU Dresden, Helmholtzstr. 18, Dresden, 01069, Sachsen, Germany

    Gerald Gerlach

  2. Fak. Elektrotechnik und, Informationstechnik, TU Dresden, Mommsenstr. 13, Dresden, 01069, Sachsen, Germany

    Klaus-Jürgen Wolter

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Neubert, H. (2012). Uncertainty-Based Design Optimization of MEMS/NEMS. In: Gerlach, G., Wolter, KJ. (eds) Bio and Nano Packaging Techniques for Electron Devices. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-28522-6_6

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