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Bio and Nano Packaging Techniques for Electron Devices pp 539–556Cite as

Photonic System Integration of Optical Waveguides in MOEMS

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Abstract

This chapter gives an overview about the state-of-the-art of photonic system integration into electronic systems. Apart from parallel optical communication within high performance computing systems as its main driver, photonic system integration will be a key enabler for advanced opto-mechatronic systems especially for sensing in bio- and nano-electronics. From the technological point-of-view waveguide fabrication, integration as well as its coupling with electro-optical components is discussed. Requirements and trends for active optical components as well as advancements in nano-photonic integration will be considered. Furthermore, the challenges for this hybrid system integration will be shown as well as future developments.

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Authors and Affiliations

  1. Electronics Packaging Laboratory, Technische Universität Dresden, 01062, Dresden, Germany

    Ralf Rieske

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  1. Ralf Rieske
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Correspondence to Ralf Rieske .

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Editors and Affiliations

  1. Fak. Elektrotechnik, Inst. Festkörperelektronik, TU Dresden, Helmholtzstr. 18, Dresden, 01069, Sachsen, Germany

    Gerald Gerlach

  2. Fak. Elektrotechnik und, Informationstechnik, TU Dresden, Mommsenstr. 13, Dresden, 01069, Sachsen, Germany

    Klaus-Jürgen Wolter

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Rieske, R. (2012). Photonic System Integration of Optical Waveguides in MOEMS. In: Gerlach, G., Wolter, KJ. (eds) Bio and Nano Packaging Techniques for Electron Devices. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-28522-6_27

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