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Nanometer-Scale Four-Point Probe Resistance Measurements of Individual Nanowires by Four-Tip STM

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Atomic Scale Interconnection Machines

Part of the book series: Advances in Atom and Single Molecule Machines ((AASMM))

Abstract

We present a review of our recent results about transport properties of nanowires measured by a four-tip scanning tunneling microscope (STM) installed with metal-coated carbon nanotube (CNT) tips. We first present our custom-made apparatus (with UNISOKU Co.) as well as CNT tips, and then some case studies with two different samples, Co-silicide nanowires self-assembled on Si(110) surface and Cu nanowires made by damascene processes used in LSI industry. It is shown that the four-tip STM with CNT tips is versatile and powerful for measuring the conductivity of individual nanostructures.

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Acknowledgments

The present work was done in collaboration with UNISOKU Co., Ltd. in construction of the four-tip STM and Prof. M. Katayama in fabricating CNT tips. It was fully supported by the SENTAN Program of the Japan Science and Technology Agency (JST), and also by Grants-in-Aid for Scientific Research and A3 Foresight Program from the Japanese Society for the Promotion of Science (JSPS).

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Author notes

  1. S. Yoshimoto

    Present address: Institute of Solid State Physics, University of Tokyo, Kashiwa, 277-8581, Japan

Authors and Affiliations

  1. Department of Physics, School of Science, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan

    S. Hasegawa, T. Hirahara, Y. Kitaoka, S. Yoshimoto & T. Tono

  2. School of Engineering, University of Tokyo, Tokyo, 113-0033, Japan

    T. Ohba

Authors
  1. S. Hasegawa
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  2. T. Hirahara
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  3. Y. Kitaoka
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  4. S. Yoshimoto
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  5. T. Tono
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  6. T. Ohba
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Corresponding author

Correspondence to S. Hasegawa .

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Editors and Affiliations

  1. , GNS, CNRS, Rue J. Marvig 29, Toulouse Cedex, 31055, France

    Christian Joachim

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Hasegawa, S., Hirahara, T., Kitaoka, Y., Yoshimoto, S., Tono, T., Ohba, T. (2012). Nanometer-Scale Four-Point Probe Resistance Measurements of Individual Nanowires by Four-Tip STM. In: Joachim, C. (eds) Atomic Scale Interconnection Machines. Advances in Atom and Single Molecule Machines. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-28172-3_12

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  • DOI: https://doi.org/10.1007/978-3-642-28172-3_12

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  • Publisher Name: Springer, Berlin, Heidelberg

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  • Online ISBN: 978-3-642-28172-3

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