Skip to main content

Practice of Surface and Interface Analysis with AES and XPS

  • Chapter
  • First Online:
  • 6088 Accesses

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 49))

Abstract

To ensure optimum results of practical surface analysis studies, sample preparation, instrumental setup, and data acquisition have to be performed with care. Most important is avoidance of artifacts that may have a detrimental effect on the data, such as charging and beam effects. Any task begins with a precise identification of the problem and clarification of the question whether the task and the sample are compatible with surface analysis, and which result can be principally expected from the analytical study. Therefore, an analytical strategy is required.

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

References

  1. C.J. Powell, M.P. Seah, J. Vac. Sci. Technol. A8, 735 (1990)

    ADS  Google Scholar 

  2. I. Kartio, K. Laajaleto, E. Suoninen, S. Karthe, R. Szargan, Surf. Interface Anal. 18, 807 (1992)

    Article  Google Scholar 

  3. G. Iucci, L. Rossi, N. Rosato, I. Savini, G. Duranti, G. Polzonetti, J. Mater. Sci. Mater. Med. 17, 779 (2006)

    Article  Google Scholar 

  4. C. Fadley, Prog. Surf. Sci. 16, 275 (1984)

    Article  ADS  Google Scholar 

  5. H.E. Bishop, Surf. Interface Anal. 15, 27 (1990)

    Article  Google Scholar 

  6. M. Zharnikov, M. Neuber, M. Grunze, Surf. Rev. Lett. 5, 501 (1998)

    Article  Google Scholar 

  7. R. Fasel, P. Aebi, L. Schlapbach, J. Osterwalder, Phys. Rev. B 52, R2313 (1995)

    Article  ADS  Google Scholar 

  8. D.P. Woodruff, A.M. Bradshaw, Rep. Prog. Phys. 57, 1029 (1994)

    Article  ADS  Google Scholar 

  9. J.H. Thomas III, Photon Beam Damage and Charging at Solid Surfaces, in Beam Effects, Surface Topography and Depth Profiling in Surface Analysis, ed. by A.W. Czanderna, C.J. Powell, T.E. Madey (Plenum Press, New York, 1998), pp. 1–37

    Google Scholar 

  10. K. Röll, Appl. Surf. Sci. 5, 388 (1980)

    Article  Google Scholar 

  11. S. Scanning Microsc 1, 989 (1987)

    Google Scholar 

  12. A.W. Czanderna, C.J. Powell, T.E. Madey (eds.), Specimen Handling, Preparation, and Treatments in Surface Characterization (Kluwer Academic/Plenum Publishers, New York, 1998)

    Google Scholar 

  13. ISO 18116, Surface Chemical Analysis – Guidelines for Preparation and Mounting of Specimens for Analysis (ISO, Geneva, 2005)

    Google Scholar 

  14. ISO 18117, Surface Chemical Analysis – Handling of Specimens Prior to Analysis (ISO, Geneva, 2009)

    Google Scholar 

  15. S. Kurz, Diploma thesis, Stuttgart University, Stuttgart, 2010

    Google Scholar 

  16. S. Hofmann, R. Frech, Anal. Chem. 57, 716 (1985)

    Article  Google Scholar 

  17. J.R. Vig, UV/Ozone Cleaning of Surfaces: A Review, in Surface Contamination, ed. by K.L. Mittal (Plenum Press, New York, 1979), pp. 235–254

    Chapter  Google Scholar 

  18. J.H. Thomas III, S. Hofmann, J. Vac. Sci. Technol. A 3, 1921 (1985)

    Article  ADS  Google Scholar 

  19. R.L. Moore, L. Salvat, G. Sundberg, V. Greenhut, J. Vac. Sci. Technol. A 3, 2426 (1985)

    Article  ADS  Google Scholar 

  20. J.M. Walls, D.D. Han, D.E. Sykes, Surf. Interface Anal. 1, 204 (1979)

    Article  Google Scholar 

  21. J. Verhoeven, Techniques to Obtain Atomically Clean Surfaces, in Surface Contamination, ed. by K.L. Mittal (Plenum Press, New York, 1979), pp. 499–512

    Chapter  Google Scholar 

  22. R.G. Musket, W. McLean, C.A. Colminares, D.M. Makowiecki, W.J. Siekhaus, Appl. Surf. Sci. 10, 143 (1982)

    Article  Google Scholar 

  23. J.C. Rivière, Instrumentation, in Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, 2nd edn., ed. by D. Briggs, M.P. Seah (Wiley, Chichester, 1990), pp. 19–83

    Google Scholar 

  24. H.E. Farnsworth, J. Vac. Sci. Technol. 20, 275 (1982)

    Article  ADS  Google Scholar 

  25. J.L. Vossen, J.H. Thomas III, J.S. Maa, O.R. Mesker, G.O. Fowler, J. Vac. Sci. Technol. A 1, 1452 (1983)

    Article  ADS  Google Scholar 

  26. J.C. Fuggle, XPS in Ultra High Vacuum Conditions, in Handbook of X-ray and Ultraviolet Photoelectron Spectroscopy, ed. by D. Briggs (Heyden, London, 1977), pp. 273–312

    Google Scholar 

  27. P. Lejček, Grain Boundary Segregation in Metals (Springer, Berlin, 2010)

    Google Scholar 

  28. A. Zalar, S. Hofmann, Surf. Interface Anal. 2, 183 (1980)

    Article  Google Scholar 

  29. J.F. Bresse, Scann. Electron Microsc. IV, 1465 (1985)

    Google Scholar 

  30. W.H. Gries, Surf. Interface Anal. 7, 29 (1985)

    Article  Google Scholar 

  31. M. Procop, A. Klein, I. Rechenberg, D. Krueger, Surf. Interface Anal. 25, 458 (1997)

    Article  Google Scholar 

  32. P. Lejček, S. Hofmann, Crit. Rev. Solid State Mater. Sci. 33, 133 (2008)

    Article  Google Scholar 

  33. S. Hofmann, P. Lejček, Int. J. Mater. Res. 100, 1167 (2009)

    Article  Google Scholar 

  34. P. Lejček, Anal. Chim. Acta 297, 165 (1994)

    Article  Google Scholar 

  35. P. Lejček, S. Hofmann, Surf. Sci. 307–309, 798 (1994)

    Google Scholar 

  36. P. Braun, W. Färber, Surface Sci. 47, 57 (1975)

    Article  ADS  Google Scholar 

  37. J. Liday, S. Hofmann, R. Harman, Vacuum 43, 331 (1992)

    Article  Google Scholar 

  38. E. Bauer, H. Poppa, F. Bonczek, J. Appl. Phys. 45, 5164 (1974)

    Article  ADS  Google Scholar 

  39. M.P. Seah, Surface Sci. 40, 595 (1973)

    Article  ADS  Google Scholar 

  40. M.P. Seah, Appendix 1, in Practical Surface Analysis, vol. 1, 2nd edn., ed. by D. Briggs, M.P. Seah (Wiley, Chichester, 1990), pp. 531–540

    Google Scholar 

  41. P.J. Cumpson, M.P. Seah, S.J. Spencer, Surf. Interface Anal. 24, 687 (1996)

    Article  Google Scholar 

  42. M.P. Seah, Instrument Calibration for AES and XPS, in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs, J.T. Grant (IM Publications, Chichester, 2003), pp. 167–189

    Google Scholar 

  43. M.P. Seah, I.S. Gilmore, S.J. Spencer, J. Electron Spectrosc. Relat. Phenom. 104, 73 (1999)

    Article  Google Scholar 

  44. NPL Systems for the Intensity Calibration of Auger and X-ray Photoelectron Spectrometers, A1 and X1 (NPL, Teddington). www.npl.co.uk/npl/cmmt/sis/index.html

  45. ISO 15472, Surface Chemical Analysis-X-ray Photoelectron Spectrometers – Calibration of Energy Scales (ISO, Geneva, 2001)

    Google Scholar 

  46. ISO 17973, Surface Chemical Analysis-Medium Resolution Auger Electron Spectrometers – Calibration of Energy Scales for Elemental Analysis (ISO, Geneva, 2002)

    Google Scholar 

  47. ISO 17974, Surface Chemical Analysis – High Resolution Auger Electron Spectrometers – Calibration of Energy Scales for Elemental and Chemical State Analysis (ISO, Geneva, 2002)

    Google Scholar 

  48. ISO 21270, Surface Chemical Analysis – X-ray Photoelectron and Auger Electron Spectrometers – Linearity of Intensity Scale (ISO, Geneva, 2003)

    Google Scholar 

  49. S. Hofmann, Auger Electron Spectroscopy, in Wilson & Wilson’s Comprehensive Analytical Chemistry, vol. IX, ed. by G. Svehla (Elsevier, Amsterdam, 1979), pp. 89–172

    Google Scholar 

  50. S. Hofmann, G. Blank, H. Schultz, Z. Metall. 67, 189 (1976)

    Google Scholar 

  51. A.W. Czanderna, C.J. Powell, T.E. Madey (eds.), Beam Effects, Surface Topography and Depth Profiling in Surface Analysis (Plenum Press, New York, 1998)

    Google Scholar 

  52. M.P. Seah, Quantification in AES and XPS, in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs, J.T. Grant (IM Publications, Chichester, 2003), pp. 345–375

    Google Scholar 

  53. M.P. Seah, Charge Referencing Techniques for Insulators, Appendix 2, in Practical Surface Analysis, vol. 1, 2nd edn., ed. by D. Briggs, M.P. Seah (Wiley, Chichester, 1990), pp. 541–554

    Google Scholar 

  54. M.A. Kelly, Analyzing Insulators with XPS and AES, in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (IM Publications, Chichester, 2003), pp. 191–210

    Google Scholar 

  55. J. Cazaux, J. Electron Spectrosc. Relat. Phenom. 105, 155 (1999)

    Article  Google Scholar 

  56. J. Cazaux, J. Electron Spectrosc. Relat. Phenom. 113 (2000) 15

    Article  Google Scholar 

  57. J.R. Waldrop, E.a. Kraut, S.P. Kowalczyk, R.W. Grant, Surf. Sci. 132, 513 (1983)

    Google Scholar 

  58. M. Yoshitake, K. Ohmori, T. Chikyow, Surf. Interface Anal. 42, 70 (2010)

    Google Scholar 

  59. P. Swift, Surf. Interface Anal. 4, 47 (1982)

    Article  Google Scholar 

  60. W.E.S. Unger, T. Gross, O. Boese, A. Lippitz, T. Fritz, U. Gelius, Surf. Interface Anal. 29, 535 (2000)

    Article  Google Scholar 

  61. J. Cazaux, J. Appl. Phys., 59, 1418 (1986)

    Article  ADS  Google Scholar 

  62. A. Melchinger, S. Hofmann, J. Appl. Phys. 78, 6224 (1995)

    Article  ADS  Google Scholar 

  63. M.P. Seah, S.J. Spencer, J. Electron Spectrosc. Relat. Phenom. 109, 291 (2000)

    Article  Google Scholar 

  64. S. Hofmann, J. Electron Spectrosc. 59, 15 (1992)

    Article  Google Scholar 

  65. C. LeGressus, F. Valin, M. Heuriot, M. Gautier, J.P. Durand, T.S. Sudarshan, R.G. Bomakanti, G. Blaise, J. Appl. Phys. 69, 6325 (1991)

    Article  ADS  Google Scholar 

  66. G. Blaise, C. LeGressus, J. Appl. Phys. 69, 6339 (1991)

    Article  ADS  Google Scholar 

  67. M. Liehr, P.A. Thiry, J.J. Pireaux, R. Caudano, J. Vac. Sci. Technol. A 2, 1079 (1984)

    Article  ADS  Google Scholar 

  68. P.A. Thiry, M. Liehr, J.J. Pireaux, R. Caudano, J. Electron Spectrosc. Relat. Phenom. 39, 69 (1986)

    Article  Google Scholar 

  69. R. Weissmann, K. Miller, Surf. Sci. Rep. 1, 261 (1981)

    Article  Google Scholar 

  70. C. LeGressus, D. Massignon, R. Sopizet, Surf. Sci. 68, 338 (1977)

    Article  ADS  Google Scholar 

  71. F. Ohuchi, M. Ogino, P.H. Holloway, C.-G. Pantano, Surf. Interface Anal. 2, 85 (1980)

    Article  Google Scholar 

  72. A. Zalar, Mikrochim. Acta 12, 435 (1980)

    Article  Google Scholar 

  73. A.H. Clark, T.L. Michalka, J. Mally, J. Vac. Sci. Technol. 20, 254 (1982)

    Article  ADS  Google Scholar 

  74. W. Goepel, D. Schmeisser, Sens. Actuat. 25, 325 (1987)

    Google Scholar 

  75. K.Y. Young, R.W. Hoffmann, Surf. Interface Anal. 10, 121 (1987)

    Article  Google Scholar 

  76. S. Ichimura, H.E. Bauer, J. Seiler, S. Hofmann, Surf. Interface Anal. 14, 250 (1989)

    Article  Google Scholar 

  77. C.-G. Pantano, T.E. Madey, Appl. Surf. Sci. 7, 115 (1981)

    Article  Google Scholar 

  78. S. Hofmann, Mater. Wiss. u. Werkstofftechn. 21, 93 (1990)

    Article  Google Scholar 

  79. Physical Electronics Application Note 652 (2002)

    Google Scholar 

  80. D.W. Vance, J. Appl. Phys. 42, 5430 (1971)

    Article  ADS  Google Scholar 

  81. A. Zalar, S. Hofmann, Surf. Interface Anal. 12, 83 (1988)

    Article  Google Scholar 

  82. C.-G. Pantano, A.S. D’Souza, A.M. Then, Electron Beam Damage at Solid Surfaces, in Beam Effects, Surface Topography and Depth Profiling in Surface Analysis, ed. by A.W. Czanderna, C.J. Powell, T.E. Madey (Plenum Press, New York, 1998), pp. 39–96

    Google Scholar 

  83. D.R. Baer, D.J. Gaspar, M.H. Englhard, A.S. Lea, Beam Effects During AES and XPS Analysis, in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs, J.T. Grant (IM Publications, Chichester, 2003), pp. 211–233

    Google Scholar 

  84. S. Hofmann, A. Zalar, Thin Solid Films 56, 337 (1979)

    Article  ADS  Google Scholar 

  85. H.E. Bauer, H. Seiler, Electron Microsc. 3, 214 (1980)

    Google Scholar 

  86. G.B. Hoflund, Scann. Electron Microsc. IV, 1391 (1985)

    Google Scholar 

  87. S. Hofmann, Mikrochim. Acta Part I, 321 (1987)

    Google Scholar 

  88. S. Tanuma, T. Kimura, K. Nishida, S. Hashimoto, M. Inoue, T. Ogiwara, M. Suzuki, K. Miura, Appl. Surf. Sci. 241, 122 (2005)

    Article  ADS  Google Scholar 

  89. S. Hofmann, J.M. Sanz, Surf. Interface Anal. 6, 75 (1984)

    Article  Google Scholar 

  90. S. Hofmann, J.M. Sanz, Fres. Z. Anal. Chem. 314, 215 (1983)

    Article  Google Scholar 

  91. H.J. Dudek, Z. Angew. Phys. 31, (1971) 331

    Google Scholar 

  92. B.G. Baker, B.A. Sexton, Surf. Sci. 52, 353 (1975)

    Article  ADS  Google Scholar 

  93. J. Cazaux, Appl. Surf. Sci. 20, 457 (1985)

    Article  ADS  Google Scholar 

  94. H.P. Chang, J.H. Thomas III, J. Electron Spectrosc. Relat. Phenom. 26, 203 (1982)

    Article  Google Scholar 

  95. K. Yoshihara, A. Tanaka, Surf. Interface Anal. 33, 252 (2002)

    Article  Google Scholar 

  96. J.C. Klein, C.P. Li, D.M. Hercules, J.F. Black, Appl. Spectrosc. 38,729 (1984)

    Article  ADS  Google Scholar 

  97. S.J. Harris, Documentary Standards in Surface Analysis: The Way of the Future?, in Handbook of Surface and Interface Analysis, ed. by J.C. Rivière, S. Myrha, (Marcel Dekker, New York 1998), Appendix 5, pp. 907–927

    Google Scholar 

  98. D. Baer: Surf. Interface Anal. 43, 1444 (2011)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Siegfried Hofmann .

Rights and permissions

Reprints and permissions

Copyright information

© 2013 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Hofmann, S. (2013). Practice of Surface and Interface Analysis with AES and XPS. In: Auger- and X-Ray Photoelectron Spectroscopy in Materials Science. Springer Series in Surface Sciences, vol 49. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-27381-0_8

Download citation

Publish with us

Policies and ethics