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Instrumentation

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Auger- and X-Ray Photoelectron Spectroscopy in Materials Science

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 49))

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Abstract

The general arrangement of the elements of any surface analysis instrument (here electron spectrometer) is shown in Fig.1.2. Figure 2.1a shows a cross section of a typical XPS instrument and Fig.2.1b that of a typical AES spectrometer. The main parts are (1) the specimen on a sample holder with x–y–z movement stage, (2) an excitation source (X-ray source for XPS, electron gun for AES), (3) the electron energy analyzer with detector, and (4) an auxiliary ion gun. Whereas these elements are mounted within a vacuum chamber, the detection and steering electronics are placed outside in the laboratory room.

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Authors and Affiliations

  1. Max-Planck-Institute for Intelligent Systems (formerly Max-Planck-Institute for Metals Research), Heisenbergstrasse 3, 70569, Stuttgart, Germany

    Professor Dr. Siegfried Hofmann

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  1. Professor Dr. Siegfried Hofmann
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Correspondence to Siegfried Hofmann .

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Hofmann, S. (2013). Instrumentation. In: Auger- and X-Ray Photoelectron Spectroscopy in Materials Science. Springer Series in Surface Sciences, vol 49. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-27381-0_2

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