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A Study on the Electrical Properties of the BaTiO3 Ceramic Thin Films

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Grid and Distributed Computing (GDC 2011)

Part of the book series: Communications in Computer and Information Science ((CCIS,volume 261))

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Abstract

Polycrystalline BaTiO3 thin films have been prepared on slid grass substrate by RF/DC magnetron sputtering equipment. The films were deposited at evoporator system and were annealed at heattreatment. The films had a dense microstruture with fine grains. The electrical properties of the films were dramatically controlled with annealing. Samples Preparation were analyzed in term of PTCR(positive temperature coefficient of Resistivity) Samples were made in the substrate tempera-true of 400°C deposition time of 10 hours,and forward power of 210watt. R-T(resistivity-tempera-true) Characteristics of the samples were investigated as a function of the substrate type and the ambient temperature. The resistivity of the thin film specimens was compared with that of the bulk type specimens. By using RF/DC magnetron sputtering system, we obtained lower resistivity in the thermistor with thin BaTiO3 film than that in the bulk type thermistor.

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References

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Author information

Authors and Affiliations

  1. Division of Mechanical Design Engineering, Chon-buk National University, Dukjin-dong, Jeon-ju city, Jeollabuk-do, 561-756, Korea

    Ik-Tae Im

  2. Department of Electronics Engineering, Chung Woon University, 29, NamJang-Ri, HongSung-Ub, HongSung Kun, ChoongChungnam-do, 350-701, Korea

    Hyun Seob Jo

  3. Department of Mechanical System Engineering, Chonbuk National University, Dukjin-dong, Jeon-ju city, Jeollabuk-do, 561-756, Korea

    Sung Hoon Oh

  4. Department of IT Applied System Engineering, Chon-buk National University, Dukjin-dong, Jeon-ju city, Jeollabuk-do, 561-756, Korea

    Byung Moon So

Authors
  1. Ik-Tae Im
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  2. Hyun Seob Jo
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  3. Sung Hoon Oh
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  4. Byung Moon So
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Editor information

Editors and Affiliations

  1. Multimedia Engineering Department, Hannam University, 133 Ojeong-dong, Daeduk-gu, Daejeon, Korea

    Tai-hoon Kim

  2. The Ohio State University, 470 Hitchcock Hall, 2070 Neil Avenue, 43210-1275, Columbus, OH, USA

    Hojjat Adeli

  3. Chungwoon University, 350-701, Chungnam, Korea

    Hyun-seob Cho

  4. Department of Mathematics and Computer Science, University of Perugia, Via Vanvitelli, 1, 06123, Perugia, Italy

    Osvaldo Gervasi

  5. Department of Computer Science and Engineering, Arizona State University, 85281, Mesa, AZ, USA

    Stephen S. Yau

  6. School of Computing and Information Systems, University of Tasmania, Hobart, TAS, Australia

    Byeong-Ho Kang

  7. Universidad Complutense de Madrid, 28040, Madrid, Spain

    Javier García Villalba

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© 2011 Springer-Verlag Berlin Heidelberg

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Im, IT., Jo, H.S., Oh, S.H., So, B.M. (2011). A Study on the Electrical Properties of the BaTiO3 Ceramic Thin Films. In: Kim, Th., et al. Grid and Distributed Computing. GDC 2011. Communications in Computer and Information Science, vol 261. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-27180-9_44

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  • DOI: https://doi.org/10.1007/978-3-642-27180-9_44

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-27179-3

  • Online ISBN: 978-3-642-27180-9

  • eBook Packages: Computer ScienceComputer Science (R0)

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