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Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN)

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Book cover Scanning Probe Microscopy in Nanoscience and Nanotechnology 3

Part of the book series: NanoScience and Technology ((NANO))

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Abstract

Nanoscale science and technology demands novel approaches and new knowledge for further development. Nanofabrication has been widely employed in modern science and engineering. Probe-based nanolithography is a common technique to manufacture nanostructures. This research contributes fundamental understanding in surface science through development of a new methodology. A delicate hardware system was designed and constructed to realize the nanometer-scale direct writing. A simple and unique process, namely, laser-assisted scanning probe alloying nanolithography (LASPAN), to fabricate well-defined nanostructures has been developed. The LASPAN system, process, and the application in gold-silicon (Au-Si) binary system have been discussed in this chapter.

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Notes

  1. 1.

     ∗ Currently at Applied Optoelectronics, Inc.

  2. 2.

     † Currently at Harvard University

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Acknowledgements

This work was sponsored by the National Science Foundation (grant number 0506082).

Author information

Author notes

  1. Luohan Peng

    Present address: Applied Optoelectronics, Inc., Sugar Land, USA

  2. Huiliang Zhang

    Present address: Harvard University, Cambridge, USA

Authors and Affiliations

  1. Materials Science and Engineering, Texas A&M University, College Station, TX, USA

    Luohan Peng

  2. Harvard-Smithsonian Center for Astrophysics, Cambridge, MA, USA

    Huiliang Zhang

  3. 214 Zachry Engineering Center, Electrical Engineering, Texas A&M University, College Station, TX, USA

    Philip Hemmer

  4. Mechanical Engineering, Texas A&M University, College Station, TX, USA

    Hong Liang

Authors
  1. Luohan Peng
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  2. Huiliang Zhang
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  3. Philip Hemmer
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  4. Hong Liang
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Editor information

Editors and Affiliations

  1. , Nanoprobe Laboratory for Bio- &, Ohio State University, West 19th Avenue 201, Columbus, 43210-1142, Ohio, USA

    Bharat Bhushan

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© 2012 Springer-Verlag Berlin Heidelberg

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Peng, L., Zhang, H., Hemmer, P., Liang, H. (2012). Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN). In: Bhushan, B. (eds) Scanning Probe Microscopy in Nanoscience and Nanotechnology 3. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-25414-7_1

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