Calculation and Measurement on Deformation of the Piezoelectric Pump Actuator
The piezoelectric pump actuator deformation of the piezoelectric fluidic angular rate sensor was researched. At first, the principle of the piezoelectric pump operation was analyzed. At second, using the finite element method, the deformation of the piezoelectric pump actuator was calculated, then the deforming curve equation was obtained. At last, the method of measurement and calculation for the deformation volume fluctuations was given at the base of the deformation curve equation, which had been proved. Therefore it is possible to select the piezoelectric pump by using this method.
KeywordsPiezoelectric fluidic angular rate sensors Piezoelectric pump Deformation
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