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Nanostructured Materials and Their Applications pp 155–170Cite as

Introduction to Organic Vapor Phase Deposition (OVPDⓇ) Technology for Organic (Opto-)electronics

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Abstract

In this chapter, the organic vapor phase deposition (OVPDⓇ) technology combined with the Close Coupled Showerhead (CCS) technology for the fabrication of sophisticated opto-electronic organic devices based on open literature will be shortly reviewed. Typically, organic (opto-)electronic devices are fabricated by vacuum thermal evaporation (VTE), which is in contrast with the OVPDⓇ technology. The deposition of single organic films, the morphology control by OVPD and the proposed benefits of mixing organic materials, and applying non-sharp interfaces for the overall organic light emitting diode (OLED) performance will be discussed.

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Acknowledgments

This work was the result of a team effort from the groups at AIXTRON AG, Philips BU OLED, Aachen, Technische Hochschule (TU) Braunschweig, and the Rheinisch Westfälische Technische Hochschule (RWTH), Aachen, which performed most of the work reported in this article.

Part of this work was financially supported by the Federal Ministry of Education and Research in Germany (BMBF, No. 001BD153; No. 13N8650, No. 13N8993, and BMU 0329927B).

OVPD{ $Ⓡ$} technology has been exclusively licensed to AIXTRON from Universal Display Corporation, Ewing, NJ, USA, for equipment manufacture. OVPD{ $Ⓡ$} technology is based on an invention by Professor Stephen R. Forrest et al. at Princeton University, USA, which was exclusively licensed to UDC, AIXTRON, and UDC have jointly developed and qualified OVPD{ $Ⓡ$} pre-production equipment.

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Authors and Affiliations

  1. AIXTRON AG, Kaiserstr. 98, 52134, Herzogenrath, Germany

    Dietmar Keiper, Nico Meyer & Michael Heuken

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  1. Dietmar Keiper
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  2. Nico Meyer
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  3. Michael Heuken
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Editors and Affiliations

  1. , Lab for Thin Films-Nanosystems, Aristotle University of Thessaloniki, Thessaloniki, 54124, Greece

    Stergios Logothetidis

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Keiper, D., Meyer, N., Heuken, M. (2012). Introduction to Organic Vapor Phase Deposition (OVPDⓇ) Technology for Organic (Opto-)electronics. In: Logothetidis, S. (eds) Nanostructured Materials and Their Applications. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-22227-6_8

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