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Laser-Based Growth of Nanostructured Thin Films

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Nanostructured Materials and Their Applications

Part of the book series: NanoScience and Technology ((NANO))

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Abstract

The development of powerful, pulsed lasers with immense power has drastically changed our perception of light-matter interactions and opened new ways of implementing laser sources for the growth and processing of nanostructured materials, making Pulsed Laser Deposition (PLD) as one of the most important techniques in the nanotechnology era. In this work, we describe the main parts of a PLD system and the basic physical processes involved, as well as some laser processes for microstructural control of the grown materials. In order to establish firm understanding of the PLD processes, three case studies are presented as examples: (a) External Control of Ablated Species and Application to Tetrahedral Amorphous Carbon (ta-C) Films, (b) Self-assembled nanoparticles (NPs) into dielectric-matrix films and superlattices, (c) Controlling of the atomic structure and nanostructure of intermetallic and glassy films.

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Acknowledgments

The author would like to acknowledge Prof. C. Kosmidis for his long collaboration in developing the PLD system at the University of Ioannina and in laser research, Dr. D.C. Koutsogeorgis for the careful reading of the manuscript and for crucial comments, Prof. Ph. Komninou, Dr. G. Dimitrakopoulos, and Dr. Th. Kehagias for the TEM images presented in Figs. 4.10, 4.11, 4.14, 4.15, my former students G.M. Matenoglou, L.E. Koutsokeras, and H. Zoubos, and my fellow colleagues Ch.E. Lekka and G.A. Evangelakis for their research collaboration.

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  1. Department of Materials Science and Engineering, University of Ioannina, GR-45110, Ioannina, Greece

    P. Patsalas

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    Stergios Logothetidis

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Patsalas, P. (2012). Laser-Based Growth of Nanostructured Thin Films. In: Logothetidis, S. (eds) Nanostructured Materials and Their Applications. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-22227-6_4

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