Abstract
Sensitivity is one of the most important parameters for piezoresistive pressure sensors. It is usually through superior design of the full scale output of pressure sensors to achieve high sensitivity of the devices and meet the requirement for certain application. Two kinds of methods of evaluating the full scale output of pressure sensors are discussed .Both of them are based on finite element analysis (FEA) and integration of stress difference with respect to certain path, which are realized by ANSYS. In addition, results of these two methods are coincident with each other. The full scale output of the pressure sensor by simulation is 42.996mv while the best result from experiment is 43.112mv. For all the experiment results, relative errors are limited to 2.5%. Therefore the experiment results show good agreement with the simulation results.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Krondorfer, R., Kim, Y.K., Kim, J., et al.: Finite element simulation of package stress in transfer molded MEMS pressure sensors. Microelectron Reliab. 44, 1995 (2004)
Tao, C., Zhaohua, Z., Tianling, R., et al.: A novel dual-functional MEMS sensor integrating both pressure & temperature units. Journal of Semiconductor 31(7) (2010)
Smith, C.S.: Piezoresistance effect in germanium and silicon. Phys. Rev. 94, 42 (1954)
Yao, C., Xu, K., Ma, W.: The mechanical model and geometric factors of piezoresistive pressure sensors. Process Automation Instrumentation 10(8), 20–24 (1989)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2011 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Han, R., Zhang, Z., Ren, T., Lin, H., Pang, B. (2011). Methods of Superior Design for the Full Scale Output of Piezoresistive Pressure Sensors. In: Wan, X. (eds) Electrical Power Systems and Computers. Lecture Notes in Electrical Engineering, vol 99. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-21747-0_8
Download citation
DOI: https://doi.org/10.1007/978-3-642-21747-0_8
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-21746-3
Online ISBN: 978-3-642-21747-0
eBook Packages: EngineeringEngineering (R0)