Methods of Superior Design for the Full Scale Output of Piezoresistive Pressure Sensors
Sensitivity is one of the most important parameters for piezoresistive pressure sensors. It is usually through superior design of the full scale output of pressure sensors to achieve high sensitivity of the devices and meet the requirement for certain application. Two kinds of methods of evaluating the full scale output of pressure sensors are discussed .Both of them are based on finite element analysis (FEA) and integration of stress difference with respect to certain path, which are realized by ANSYS. In addition, results of these two methods are coincident with each other. The full scale output of the pressure sensor by simulation is 42.996mv while the best result from experiment is 43.112mv. For all the experiment results, relative errors are limited to 2.5%. Therefore the experiment results show good agreement with the simulation results.
Keywordspiezoresistive pressure sensors full scale output finite element analysis (FEA) integration of stress difference
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