Abstract
The use of microelectromechanical systems (MEMS) technology to develop strain sensors (resonant and capacitive) is the main topic of this paper. Sensing technology can advance the design and integrity of structural systems in various industries by enabling monitoring of strains and stress concentrations within a mechanical structure in real-time. MEMS-based strain sensors enable performance improvements through increased resolutions, increased operation bandwidths and reduced sensitivity to noise. Therefore, the application of these devices can significantly improve the design robustness and efficiency by predicting catastrophic failures and enabling lightweight designs. MEMS strain sensors can impact the oil and gas, automotive, aerospace and buildings industries through the real-time monitoring of critical components. In addition to device performance, packaging, temperature compensation and long-term drift are important design considerations.
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Senesky, D.G., Jamshidi, B. (2011). MEMS Strain Sensors for Intelligent Structural Systems. In: Mukhopadhyay, S.C. (eds) New Developments in Sensing Technology for Structural Health Monitoring. Lecture Notes in Electrical Engineering, vol 96. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-21099-0_4
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DOI: https://doi.org/10.1007/978-3-642-21099-0_4
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