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Ver- und Entsorgung von Reinstmedien

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Reinraumtechnik

Part of the book series: VDI-Buch ((VDI-BUCH))

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Zusammenfassung

Die Reinstmedientechnik als Teilgebiet der Reinraumtechnik und der Prozessver- und -entsorgungstechnik beschäftigt sich mit der Ver- und Entsorgung von Prozessgeräten mit Prozessmedien hoher und höchster Reinheit, einschließlich des Recyclings und anderweitiger Wiedernutzbarmachung von Ressourcen (Abb. 8.1). Der vorliegende Abschnitt behandelt all Bereiche der Reinstmedientechnik, ausser der Erzeugung und Verteilung von Reinstwasser, die in einem separaten Abschnitt behandelt werden.

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Author information

Authors and Affiliations

  1. Applied Materials GmbH, AGS EPG SEP, Philipp-Hauck-Straße 6, 85622, Feldkirchen, Deutschland

    Andreas Neuber

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  1. Andreas Neuber
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Correspondence to Andreas Neuber .

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Editors and Affiliations

  1. Humboldtstraße 32, Wiesbaden, 65189, Germany

    Lothar Gail

  2. technik und Automatisierung IPA, Fraunhofer-Institut für Produktions-, Nobelstraße 12, Stuttgart, 70569, Germany

    Udo Gommel

  3. Wickerer Weg 8, Hattersheim, 65795, Germany

    Hans-Peter Hortig

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© 2012 Springer-Verlag Berlin Heidelberg

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Neuber, A. (2012). Ver- und Entsorgung von Reinstmedien. In: Gail, L., Gommel, U., Hortig, HP. (eds) Reinraumtechnik. VDI-Buch(). Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-19435-1_8

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