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Microsystems and Nanotechnology pp 207–260Cite as

Microelectromechanical Sensors

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Abstract

Microelectromechanical sensors are miniature sensors made by micro fabrication technique, with typical characterization dimensions between nanometer and millimeter range. Micro sensors have attracted great attention because of their many merits and wide applications. They have experienced several significant stages in the last few decades, along with tremendous progress in fabrication technologies. The main advantages of microsensors are their capability of batch fabrication, low cost, small size, light weight, low power consumption, and ease for integration. In this chapter, the development of physical, chemical and biological microsensors are described, and the principles, fabrication techniques, properties and applications of several microsensors are presented.

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Authors and Affiliations

  1. State Key Laboratory of Transducer Technology Institute of Electronics, Chinese Academy of Sciences, No 19 Bei-Si-Huan West Road, Beijing, 100190, China

    Shanhong Xia, Deyong Chen, Zhimei Qi, Xiuli He, Chunrong Peng, Xianxiang Chen, Chao Bian, Lan Qu & Jizhou Sun

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  1. Shanhong Xia
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  2. Deyong Chen
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  3. Zhimei Qi
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  4. Xiuli He
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  5. Chunrong Peng
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  6. Xianxiang Chen
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  7. Chao Bian
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  8. Lan Qu
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  9. Jizhou Sun
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Editors and Affiliations

  1. Department of Precision Instruments & Mechanology, Tsinghua University, Beijing, 100084, China

    Zhaoying Zhou

  2. Center for Nanostructure Characterization and Fabrication (CNCF), Georgia Institute of Technology, Atlanta, GA, 30332-0245, USA

    Liwei Lin

  3. Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 94720-1740, USA

    Zhonglin Wang

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© 2012 Tsinghua University Press, Beijing and Springer-Verlag Berlin Heidelberg

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Xia, S. et al. (2012). Microelectromechanical Sensors. In: Zhou, Z., Wang, Z., Lin, L. (eds) Microsystems and Nanotechnology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18293-8_7

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