Applications of Microelectro-Mechanical Systems

Ko, Wen H.

doi:10.1007/978-3-642-18293-8_16

Wen H. Ko^4,5

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Abstract

The Chapter introduces the brief history and trends of MEMS, application of MEMS, an important opening application field—bio-medical applications, and applications of implantable MEMS—physical therapy, medical care and drug developments. The application of MEMS permeates broadly into all fields of Sciences and Engineering activities. MEMS applications will expand rapidly in all fields, in the near future.

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Authors and Affiliations

Pen-Tung Sah Research Center, Xiamen University, Xiamen, 361005, China
Wen H. Ko
EECS Department, Case Western Reserve University, Cleveland, Ohio, USA
Wen H. Ko

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Wen H. Ko
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Editors and Affiliations

Department of Precision Instruments & Mechanology, Tsinghua University, Beijing, 100084, China
Zhaoying Zhou
Center for Nanostructure Characterization and Fabrication (CNCF), Georgia Institute of Technology, Atlanta, GA, 30332-0245, USA
Liwei Lin
Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 94720-1740, USA
Zhonglin Wang

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Ko, W.H. (2012). Applications of Microelectro-Mechanical Systems. In: Zhou, Z., Wang, Z., Lin, L. (eds) Microsystems and Nanotechnology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18293-8_16

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DOI: https://doi.org/10.1007/978-3-642-18293-8_16
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-18292-1
Online ISBN: 978-3-642-18293-8
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)

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