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Integrated Nanotechnology Based on MEMS

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Abstract

In this chapter, after a brief review of integrated silicon-based MEMS fabrication techniques, MEMS techniques for nano-metric fabrication is emphasized. Using high selectivity and anisotropy of specific top-down micromachining methods, nanometric feature size can be fabricated for NEMS applications. Fabrication techniques of typical MEMS-made NEMS structures, such as nanotips, nanoapertures, nano junction, nanolines and nano-beams, are detailed in the chapter. Then, by integrating the nanoscale feature structure with the micrometric main body, typical integrated NEMS devices and their applications are addressed. The chapter also relates key size-effects of the integrated nanomechanical structures that have shown significant difference in electromechanical properties compared to their microscale counterparts, like the big difference in silicon Young’s modulus value. At last, the bright future of the integrated NEMS techniques and devices are outlooked.

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Author information

Authors and Affiliations

  1. State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China

    Xinxin Li

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  1. Xinxin Li
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Editors and Affiliations

  1. Department of Precision Instruments & Mechanology, Tsinghua University, Beijing, 100084, China

    Zhaoying Zhou

  2. Center for Nanostructure Characterization and Fabrication (CNCF), Georgia Institute of Technology, Atlanta, GA, 30332-0245, USA

    Liwei Lin

  3. Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 94720-1740, USA

    Zhonglin Wang

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© 2012 Tsinghua University Press, Beijing and Springer-Verlag Berlin Heidelberg

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Li, X. (2012). Integrated Nanotechnology Based on MEMS. In: Zhou, Z., Wang, Z., Lin, L. (eds) Microsystems and Nanotechnology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18293-8_15

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