Abstract
This article gives an introduction to the topics covered in the AMAA 2002 almanac. General concepts and terms are introduced in order to give an overview over the system and main components and issues of microsystems technology. Ranging from materials and micromachining technologies over components like sensors, package and signal processing to complex micro mechatronics and reliability issues all key topics are introduced.
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© 2002 Springer-Verlag Berlin Heidelberg
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Solzbacher, F. (2002). Microsystems Technology — a New Era Leading to Unequalled Potentials for Automotive Applications. In: Krueger, S., Gessner, W. (eds) Advanced Microsystems for Automotive Applications Yearbook 2002. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18213-6_5
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DOI: https://doi.org/10.1007/978-3-642-18213-6_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-62114-7
Online ISBN: 978-3-642-18213-6
eBook Packages: Springer Book Archive