Abstract
Infineon Technologies AG (formerly Siemens HL) developed a novel surface micromachining technology for pressure sensors. These sensors are designed for barometric air pressure sensing in automotive applications. The surface micromachining technology enables the product to be calibrated in the final package through on-chip calibration by means of low-power fuses and offers the possibility of digital interfacing. A specifically developed SMD-package allows the use of standard pick-and-place equipment for easy PCB assembly. Combined with the low space requirements the KP1xx pressure sensor family represents a low cost solution for high volume applications. The new technology opens the way to smart mixed signal pressure sensor ICs also for higher pressure ranges with additional features like self-diagnosis and integrated temperature measurement.
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© 2000 Springer-Verlag Berlin Heidelberg
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Gussmann, V. (2000). Monolithic Integrated Pressure Sensor ICs. In: Krüger, S., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 2000. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18146-7_4
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DOI: https://doi.org/10.1007/978-3-642-18146-7_4
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-62107-9
Online ISBN: 978-3-642-18146-7
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