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Exploring the Possibilities of Laser Interference Patterning for the Rapid Fabrication of Periodic Arrays on Macroscopic Areas

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Fabrication and Characterization in the Micro-Nano Range

Part of the book series: Advanced Structured Materials ((STRUCTMAT,volume 10))

Abstract

Surface patterning engineering techniques are essential to fabricate advanced topographies that can be use to modulate macroscopic properties on different materials. Particularly, Laser Interference methods enable fabrication of repetitive periodic arrays and microstructures by irradiation of the sample surface with coherent beams of light. Depending on the used laser source, different methods have emerged in the last years including Laser Interference Lithography and Direct Laser Interference Patterning. A detailed description of these techniques is presented in this chapter. In addition, several examples including fabrication of micro and sub-micrometer patterns on photoresists, conducting polymers and carbon nanotubes are described.

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Acknowledgments

The author gratefully acknowledges the contributions of: M. Beida, B.S Menéndez-Ormaza from the Fraunhofer Institute for Material and Beam Technology (Germany); D. Yuan, P. Shao, S. Das, R. Crosss, S. Graham from Georgia Institute of Technology (USA), and J. Hendricks, C.M. Shaw and D. Martin from the University of Michigan (USA). This work was financially supported by Alexander von Humboldt Foundation and the Fraunhofer Association (Grant No. Attract 692174).

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  1. Fraunhofer Institute for Material and Beam Technology (IWS), Winterbergstr 28, 01277, Dresden, Germany

    Andrés Fabián Lasagni

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  1. Andalusian Foundation for Aerospace Deve, Center for Advanced Aerospace Technologi, Seville, Spain

    Fernando A. Lasagni

  2. Fraunhofer Institute for Material and Be, Dresden, Germany

    Andrés F. Lasagni

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Lasagni, A.F. (2011). Exploring the Possibilities of Laser Interference Patterning for the Rapid Fabrication of Periodic Arrays on Macroscopic Areas. In: Lasagni, F., Lasagni, A. (eds) Fabrication and Characterization in the Micro-Nano Range. Advanced Structured Materials, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-17782-8_1

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