Skip to main content

Design and Implementation of New Sensors and Their Integration in Joints

  • Chapter

Part of the book series: Springer Tracts in Advanced Robotics ((STAR,volume 67))

Abstract

Taking full advantage of the structural capabilities of parallel kinematics demands additional machine-oriented control tasks, e.g. self-calibration and workspace monitoring. A promising strategy to simplify the corresponding algorithms is the integration of lightweight angular position sensors in passive joints. Due to the rough environment, contactless working sensors are required. In this section, two different inductive sensors manufactured by means of microtechnology are presented. The incremental sensor consists of microcoils, whose inductance changes during the rotation of a microscale on the joint shaft. The absolute sensor combines a vectorial magnetometer with a permanent magnet changing its magnetic orientation during joint movement.

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Boese, C., Kirchhoff, M.R., Feldmann, M., Güttler, J., Büttgenbach, S.: New generation of integrated position sensor systems for parallel robotic applications. In: IEEE Sensors 2009, pp. 1362–1365 (2009) ISBN 978-1-4244-5335-1

    Google Scholar 

  2. Hesselbach, J., Bier, C., Pietsch, I., Plitea, N., Büttgenbach, S., Wogersien, A., Güttler, J.: Passive joint-sensor applications for parallel robots. In: IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), vol. 4, pp. 3507–3512 (2004)

    Google Scholar 

  3. Hesselbach, J., Bier, C., Pietsch, I., Plitea, N., Büttgenbach, S., Wogersien, A., Güttler, J.: Passive-joint sensors for parallel robots. Mechatronics 15(1), 43–65 (2005)

    Article  Google Scholar 

  4. Kirchhoff, M.R., Boese, C., Güttler, J., Feldmann, M., Büttgenbach, S.: Innovative high-precision position sensor systems for robotic and automotive applications. Procedia Chemistry 1(1), 501–504 (2009)

    Article  Google Scholar 

  5. Schütz, D., Budde, C., Raatz, A., Hesselbach, J.: Parallel Kinematic Structures of the SFB 562. In: Schütz, D., Wahl, F.M. (eds.) Robotic Systems for Handling and Assembly. STAR, vol. 67, pp. 109–124. Springer, Heidelberg (2010)

    Google Scholar 

  6. Büttgenbach, S., Güttler, J., Last, P., Bier, C., Otremba, R.: Development of angular joint-sensors and application to parallel robots. In: Last, P. (ed.) 2nd Int. Colloquium of the Collaborative Research Center SFB 562, Shaker, Aachen. Fortschritte in der Robotik, vol. 9, pp. 237–251 (2005) ISBN 3-8322-3866-2

    Google Scholar 

  7. Büttgenbach, S., Wogersien, A., Bier, C., Pietsch, I.T.: Microsensors for parallel robots. In: Krefft, M. (ed.) First Int. Colloquium of the Collaborative Research Center SFB 562. Fortschritte in der Robotik, vol. 7, pp. 141–152. Shaker, Aachen (2002)

    Google Scholar 

  8. Franke, H.-J., Pavlović, N., Kirchhoff, M.R., Büttgenbach, S.: Integration of sensors and actuators in joints of parallel robots. In: Schütz, D., Raatz, A. (eds.) 3rd Int. Colloquium of the Collaborative Research Center SFB 562. Fortschritte in der Robotik, vol. 14, pp. 169–180. Shaker, Aachen (2008)

    Google Scholar 

  9. Last, P., Budde, C., Bier, C., Hesselbach, J.: Hexa-parallel-structure calibration by means of angular passive joint sensors. In: IEEE Int. Conf. on Mechatronics and Automation, vol. 3, pp. 1300–1305 (2005)

    Google Scholar 

  10. Pavlović, N., Otremba, R., Inkermann, D., Franke, H.J., Vietor, T.: Passive and adaptive joints for parallel robots. In: Schütz, D., Wahl, F.M. (eds.) Robotic Systems for Handling and Assembly. STAR, vol. 67, pp. 429–444. Springer, Heidelberg (2010)

    Google Scholar 

  11. Triltsch, U., Feldmann, M., Büttgenbach, S.: Optimization of masks for high aspect ratio UV-lithographic patterning. In: Laudon, M. (ed.) NSTI Nanotechnology Conference and Trade Show, pp. 81–84. NSTI [u.a.], Cambridge (2007) ISBN 1420061844

    Google Scholar 

  12. Triltsch, U., Feldmann, M., Boese, C., Büttgenbach, S.: Simulation tool for proximity effects in high aspect ratio UV-lithographic patterning. Sensors and Actuators, A: Physical 142(1), 429–433 (2008)

    Article  Google Scholar 

  13. Büttgenbach, S., Feldmann, M.: Application of UV depth lithography in micro system technology. Optoelectronics Letters 4(1), 1–4 (2008)

    Article  Google Scholar 

  14. Feldmann, M.: Technologien und Applikationen der UV-Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik. Berichte aus der Mikro-und Feinwerktechnik, vol. 20. Shaker, Aachen (2007) ISBN 978-3-8322-6146-7

    Google Scholar 

  15. Feldmann, M., Waldschik, A., Büttgenbach, S.: Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3d micro actuators and sensors. Microsystem Technologies 13(5-6), 557–562 (2007)

    Article  Google Scholar 

  16. Güttler, J.: Entwicklung eines gelenkintegrierten Winkelsensors für den Einsatz in hochdynamischen Parallelrobotern. Berichte aus der Mikro-und Feinwerktechnik, vol. 19. Shaker, Aachen (2006) ISBN 3-8322-5681-4

    Google Scholar 

  17. Kirchhoff, M.R., Güttler, J., Waldschik, A., Feldmann, M., Büttgenbach, S.: Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist. Microelectronic Engineering 85(5-6), 1047–1049 (2008)

    Article  Google Scholar 

  18. Jordan, A., Kirchhoff, M.R., Büttgenbach, S.: Effect analysis of magnetic annealing below curie-temperature on the magnetic properties of electrodeposited nickel-iron. Microelectronic Engineering 87, 1223–1225

    Google Scholar 

  19. Kirchhoff, M.R., Bogdanski, G., Büttgenbach, S.: Design, fabrication and characterization of a micro-fluxgate intended for parallel robot application. In: Proc. of SPIE - The International Society for Optical Engineering, vol. 7362 (2009)

    Google Scholar 

  20. Wogersien, A., Beißner, S., Samson, S., Büttgenbach, S.: Development of new inductive microsensors for angular position measurement. In: Proc. of the 2nd VDE World Microtechnologies Congress, pp. 159–163 (2003)

    Google Scholar 

  21. Wogersien, A., Samson, S., Güttler, J., Beißner, S., Büttgenbach, S.: Novel inductive eddy current sensor for angle measurement. In: IEEE Sensors 2003, vol. 2(1), pp. 236–241 (2003)

    Google Scholar 

  22. Franke, H.-J., Otremba, R., Jänicke, T.: Methodical development of optimized passive joints. In: Krefft, M. (ed.) First Int. Colloquium of the Collaborative Research Center SFB 562. Fortschritte in der Robotik, vol. 7, pp. 119–130. Shaker, Aachen (2002)

    Google Scholar 

  23. Otremba, R.: Methodische Entwicklung von Gelenken für Parallelroboter. Konstruktion (10), 82–86 (2005)

    Google Scholar 

  24. Otremba, R.: Systematische Entwicklung von Gelenken für Parallelroboter. Bericht / Inst. f. Konstruktionstechnik, vol. 67. Techn. Univ. Braunschweig, Logos, Berlin (2005) ISBN 3-8325-0811-2

    Google Scholar 

  25. Primdahl, F.: The fluxgate magnetometer. Journal of Physics E: Scientific Instruments 12(4), 241–253 (1979)

    Article  Google Scholar 

  26. Primdahl, F., Hernando, B., Nielsen, O.V., Petersen, J.R.: Demagnetising factor and noise in the fluxgate ring-core sensor. Journal of Physics E: Scientific Instruments 22(12), 1004–1008 (1989)

    Article  Google Scholar 

  27. Ripka, P.: Review of fluxgate sensors. Sensors and Actuators: A. Physical 33(3), 129–141 (1992)

    Article  Google Scholar 

  28. Ripka, P.: Advances in fluxgate sensors. Sensors and Actuators, A: Physical 106(1-3), 8–14 (2003)

    Article  Google Scholar 

  29. Güttler, J., Last, P., Otremba, R., Büttgenbach, S.: A novel angular joint-sensor using a fluxgate magnetometer. In: IEEE Sensors 2005, pp. 53–56 (2005)

    Google Scholar 

  30. Kirchhoff, M.R., Güttler, J., Büttgenbach, S.: Mikro-Magnetometer nach dem Fluxgate-Prinzip für Anwendungen in der Roboter-Sensorik: Design und mikrotechnologischer Fertigungsprozess. In: Geßner, T. (ed.) Proc. Mikrosystemtechnik Kongress, pp. 959–962. VDE, Berlin (2007) ISBN 978-3-8007-3061-2

    Google Scholar 

  31. Kirchhoff, M.R., Pavlović, N., Franke, H.-J., Büttgenbach, S.: Integration eines mikrotechnisch hergestellten Magnetometers in passive Gelenke von Parallelrobotern: Erhöhung der Funktionalität von Maschinenkomponenten. VDI Berichte (2012), 313–316 (2008)

    Google Scholar 

  32. Kirchhoff, M.R., Büttgenbach, S.: MEMS fluxgate magnetometer for parallel robot application. Journal = Microsystem Technologies 16(5), 787–790 (2010)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2010 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Kirchhoff, M.R. et al. (2010). Design and Implementation of New Sensors and Their Integration in Joints. In: Schütz, D., Wahl, F.M. (eds) Robotic Systems for Handling and Assembly. Springer Tracts in Advanced Robotics, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-16785-0_25

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-16785-0_25

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-16784-3

  • Online ISBN: 978-3-642-16785-0

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics