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Electrostatic MEMS: Modelling, Control, and Applications

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Advances in the Theory of Control, Signals and Systems with Physical Modeling

Part of the book series: Lecture Notes in Control and Information Sciences ((LNCIS,volume 407))

Abstract

This paper addresses issues related to the modelling and the control of electrostatic microelectromechanical systems (MEMS) in applications requiring high accuracy positioning, wide operation range, and high control bandwidth.A particular emphasis is put on the choice of control system architecture and its influence on potential performance in different practical operation conditions.

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Author information

Authors and Affiliations

  1. Department of Electrical Engineering, École Polytechnique de Montréal, C.P. 6079, Succursale centre-ville, Montreal, QC, Canada, H3C 3A7

    Guchuan Zhu

Authors
  1. Guchuan Zhu
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Editor information

Editors and Affiliations

  1. CAS, Unité Mathématiques et Systémes, MINES-ParisTech, 35, rue Saint-Honoré, 77300, Fontainebleau, France

    Jean Lévine

  2. Laboratoire d’ Automatique, Faculté des Sciences de l’Ingénieur Station 9, CH-1015, Lausanne, Switzerland

    Philippe Müllhaupt

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Zhu, G. (2010). Electrostatic MEMS: Modelling, Control, and Applications. In: Lévine, J., Müllhaupt, P. (eds) Advances in the Theory of Control, Signals and Systems with Physical Modeling. Lecture Notes in Control and Information Sciences, vol 407. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-16135-3_10

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  • DOI: https://doi.org/10.1007/978-3-642-16135-3_10

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-16134-6

  • Online ISBN: 978-3-642-16135-3

  • eBook Packages: EngineeringEngineering (R0)

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