Ultrathin n-Channel and p-Channel SOI MOSFETs

  • F. GámizEmail author
  • L. Donetti
  • C. Sampedro
  • A. Godoy
  • N. Rodríguez
  • F. Jiménez-Molinos
Part of the Engineering Materials book series (ENG.MAT.)


We review the electrostatic and transport properties of charge carriers in ultrathin single gate (SG) and double gate (DG) SOI transistors. Both electron and hole inversion layers are studied and the influence of silicon thickness and of different crystallographic orientations is evaluated. The origin of volume inversion effect and its consequences are investigated for both types of carrier and for the different surface orientations considered. Finally we discuss the importance of correctly modeling phonons in ultra-thin SOI structures by studying acoustic phonon confinement and its impact on carrier mobility.


Silicon Layer Inversion Layer Surface Orientation Inversion Charge Silicon Thickness 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The work of L.D. is done as part of the program Ramón y Cajal of the Ministerio de Ciencia e Innovación (M.C.I.) of Spain. Financial support from M.C.I. (contracts TEC2008-06758-C02-01 and FIS2008-05805), Junta de Andalucía (project TIC-P06-1899), EU EUROSOI + Thematic Network (FP7-CA-216373) and EU NANOSIL Network of Excellence (FP7-NOE-216171) is also acknowledged.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  • F. Gámiz
    • 1
    Email author
  • L. Donetti
    • 1
  • C. Sampedro
    • 1
  • A. Godoy
    • 1
  • N. Rodríguez
    • 1
  • F. Jiménez-Molinos
    • 1
  1. 1.Nanoelectronic Research Group, Departamento de ElectrónicaUniversidad de GranadaGranadaSpain

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