Engineering Pseudosubstrates with Porous Silicon Technology

  • N. P. Blanchard
  • A. Boucherif
  • Ph. Regreny
  • A. Danescu
  • H. Magoariec
  • J. Penuelas
  • V. Lysenko
  • J.-M. Bluet
  • O. Marty
  • G. Guillot
  • G. GrenetEmail author
Part of the Engineering Materials book series (ENG.MAT.)


In this work, we use a controlled oxidation of a mesoporous silicon substrate as a tool for extending and adjusting the Si lattice parameter to other materials such as SixGe1-x. Our approach involves four steps. First, a seed film is epitaxially grown on a single-crystal Si(100) wafer by Molecular Beam Epitaxy(MBE). Second, porosification is performed according to a standard electrochemical etching procedure but using a “two wafers technique”. Third, the porous part of the sample is oxidized at mild temperatures (300–500°C) in a dry O2 atmosphere, inducing a substantial in-plane expansion of the seed film. Fourth, an overgrowth by MBE of an epilayer is done to test the thus-obtained pseudosubstrate. The challenging task in this last step is to deoxidize the seed film surface at ~900°C without losing the strain induced by oxidation of the porous part of the sample.


Molecular Beam Epitaxy Porous Silicon Seed Layer Rapid Thermal Process Plastic Relaxation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



We would like to acknowledge the French Research Agency (ANR) for funding this work via a “Projet Blanc” N° BLAN06-1_144612.


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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  • N. P. Blanchard
    • 1
  • A. Boucherif
    • 1
  • Ph. Regreny
    • 1
  • A. Danescu
    • 1
  • H. Magoariec
    • 2
  • J. Penuelas
    • 1
  • V. Lysenko
    • 1
  • J.-M. Bluet
    • 1
  • O. Marty
    • 1
  • G. Guillot
    • 1
  • G. Grenet
    • 1
    Email author
  1. 1.Institut des Nanotechnologies de Lyon (INL), CNRS UMR-5270Université de LyonLyonFrance
  2. 2.Laboratoire de Tribologie et Dynamique des Systèmes (LTDS), CNRS UMR-5513Université de LyonLyonFrance

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