SOI Nanowire Transistors for Femtomole Electronic Detectors of Single Particles and Molecules in Bioliquids and Gases
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The need for high-throughput, label-free multiplexed sensors for chemical and biological sensing has increased in the last decade in the newer applications like healthcare, genomic and proteomic diagnostics, environmental and industrial monitoring; quality control, core defense and security areas, etc. Human genome decoding was prolonged during 13 years and has shown a complex relation between genes, proteins and illnesses. But the amount of genes is only 3 × 104, while the amount of proteins is as high as 5 × 106. To decode this amount of proteins a massive set of samples with biological solutions should be analyzed using fast and massively parallel analyzing tools.
KeywordsBovine Serum Albumin Molecule Nanowire Transistor Standard CMOS Technology Polycrystalline Silicon Film Additional Thermal Treatment
The authors would like to thank M. A. Ilnitskii for Synopsis TCAD NW FET simulations. This work was supported in part by FCNTP (grant no. GK 02.740.11.0791).
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