SOI Nanowire Transistors for Femtomole Electronic Detectors of Single Particles and Molecules in Bioliquids and Gases

  • V. P. PopovEmail author
  • O. V. Naumova
  • Yu. D. Ivanov
Part of the Engineering Materials book series (ENG.MAT.)


The need for high-throughput, label-free multiplexed sensors for chemical and biological sensing has increased in the last decade in the newer applications like healthcare, genomic and proteomic diagnostics, environmental and industrial monitoring; quality control, core defense and security areas, etc. Human genome decoding was prolonged during 13 years and has shown a complex relation between genes, proteins and illnesses. But the amount of genes is only 3 × 104, while the amount of proteins is as high as 5 × 106. To decode this amount of proteins a massive set of samples with biological solutions should be analyzed using fast and massively parallel analyzing tools.


Bovine Serum Albumin Molecule Nanowire Transistor Standard CMOS Technology Polycrystalline Silicon Film Additional Thermal Treatment 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The authors would like to thank M. A. Ilnitskii for Synopsis TCAD NW FET simulations. This work was supported in part by FCNTP (grant no. GK 02.740.11.0791).


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Copyright information

© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  1. 1.A.V. Rzhanov Institute of Semiconductor PhysicsSB RASNovosibirskRussia
  2. 2.V.N. Orekhovich Institute of Biomedical Chemistry, RAMSMoscowRussia

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