Abstract
Nano-manipulation technology is an emerging field in the development of modern science and technology. Thus, the improvement of its positioning and repositioning precision has become each nano worker’s dream and ultimate goal. However, due to the hysteresis, creep, and other nonlinearity of piezoelectric ceramics tube (PZT) as well as the probe’s tip deviations caused by cantilever deformation, it leads larger error of relative displacement between probe and sample, which adds enormous inconvenience to the nano-manipulation and repositioning. The subject is to research and design a 3-D repositioning control technology to improve repositioning accuracy.
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Xin, S., Xiaoping, J. (2010). Research on Nano-repositioning of Atomic Force Microscopy Based on Nano-manipulation. In: Li, K., Li, X., Ma, S., Irwin, G.W. (eds) Life System Modeling and Intelligent Computing. ICSEE LSMS 2010 2010. Communications in Computer and Information Science, vol 98. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-15859-9_24
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DOI: https://doi.org/10.1007/978-3-642-15859-9_24
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