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Devices to Control and Diagnose Bimorph Piezoelements

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Piezoceramic Sensors

Part of the book series: Microtechnology and MEMS ((MEMS))

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Abstract

First of all certain terms should be specified in this chapter. Control as a noun is translated from French as “supervision,” “observation to check”; “check of anything”. At the same time, in technical literature, written in English, “control” as a noun is used with the following meanings: control, check, management, regulation and measurement [1].

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Correspondence to Valeriy Sharapov .

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Sharapov, V. (2011). Devices to Control and Diagnose Bimorph Piezoelements. In: Piezoceramic Sensors. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-15311-2_7

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