Skip to main content

Processing with Ultrashort Laser Pulses

  • Chapter
  • First Online:

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 139))

Abstract

This chapter reviews the peculiarities of ultrashort laser pulse interaction with materials and the consequences for materials processing. After a short introduction, presenting time scales of typical processes and comparing previous results for femtosecond and nanosecond laser pulses, we start with the fundamentals of laser-material coupling. Then we describe energy dissipation dynamics and direct follow-up processes and finish with a consideration of bulk and surface relaxation and structure formation on a time scale much longer than the pulse duration.

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   219.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   279.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   279.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. H. Sato, S. Nishio, J. Photochem. Photobiol. C Photochem. Rev. 2, 139 (2001)

    Article  Google Scholar 

  2. L.S. Penn, R. Lin, B.S. Yilbas, Opt. Lasers Eng. 27, 297 (1997)

    Article  Google Scholar 

  3. see, e.g., the proceedings of the Conferences on Laser Ablation (COLA):J.C. Miller, R.F. Haglund (eds.), Laser Ablation: Mechanisms and Applications, Lecturer Notes in Physics 389, (Springer, Heidelberg, 1991)J.C. Miller, D.B. Geohegan, (eds.), Laser Ablation: Mechanisms and Applications - II, AIP Conference Proceedings 288 (American Institute of Physics, New York, 1994)E. Fogarassy, D.B. Geohegan, M. Stuke (eds.), Proceedings of Symposium F: Third International Symposium on Laser Ablation of the 1995 E-MRS Spring Conference, Appl. Surf. Sci. 96–98, 1 (1996)R.E. Russo, D.B. Geohegan, R.F. Haglund, R.F. Haglund Jr., K. Murakami (eds.), Proceedings of the 4th Conference on Laser Ablation, Appl. Surf. Sci. 127–129, 1 (1998)J.S. Horwitz, H.U. Krebs, K. Murakami, M. Stuke (eds.), Laser Ablation V, Appl. Phys. A 69(Supplement 1) (1999)K. Murakami, A. Yabe, J.S. Horwitz, C. Fotakis, J.T. Dickinson (eds.), Proceedings of the 6th Conference on Laser Ablation, Appl. Surf. Sci. 197–198, 1 (2002)C. Fotakis, H. Koinuma, D. Lowndes, M. Stuke, (eds.), Laser Ablation VII, Appl. Phys A 79(4–6), 713 (2004)B. Luk’yanchuk, S. Juodkazis, T. Lippert (eds.), Special Issue: Laser Ablation Fundamentals, Appl. Phys. A 92, 743 (2008)P. Schaaf, R. Serna, J.G. Lunney, E. Fogarassy (eds.), Laser synthesis and processing of advanced Materials, Appl. Surf. Sci. 254(4), 789 (2007)

    Google Scholar 

  4. A. Kaplan, Chap. 3 in The Theory of Laser Materials Processing, Springer Ser. Mater. Sci ed. by J. Dowden (Springer, 2009), p. 119

    Google Scholar 

  5. S. Eliezer, K. Mima (eds.), Applications of Laser-Plasma Interactions, Series in Plasma Physics, (CRC, 2009)

    Google Scholar 

  6. J. Reif, F. Costache, M. Bestehorn, Chap. 9 in Recent Advances in Laser Processing of Materials, ed. by J. Perriere, E. Millon, E. Fogarassy (Elsevier, 2006) p. 275

    Google Scholar 

  7. I.W. Boyd, J.I.B. Wilson, Nature 287, 278 (1980)

    Article  ADS  Google Scholar 

  8. R.R. Gattass, E. Mazur, Nat. Photonics 2, 219 (2008)

    Article  ADS  Google Scholar 

  9. D. von der Linde, K. Sokolowski-Tinten, Appl. Surf. Sci. 154–155, 1 (2000)

    Article  Google Scholar 

  10. S. Kper, M. Stuke, Appl. Phys. Lett. 54, 4 (1989)

    Article  ADS  Google Scholar 

  11. B. Rethfeld, K. Sokolowski-Tinten, D. von der Linde, S. Anisimov, Appl. Phys. A 79, 767–769 (2004)

    Article  ADS  Google Scholar 

  12. Y. Jee, K. Becker, R.M. Walser, J. Opt. Soc. Am. B 5, 648 (1988)

    Article  ADS  Google Scholar 

  13. S. Petzoldt, A.P. Elg, J. Reif, E. Matthias, Proc. SPIE 1438, 180 (1989)

    Google Scholar 

  14. F. Costache, S. Eckert, J. Reif, Appl. Phys. A 92, 897 (2008)

    Article  ADS  Google Scholar 

  15. A. Ostendorf, F. Korte, G. Kamlage, U. Klug, J. Koch, J. Serbin, N. Baersch, T. Bauer, B.N. Chichkov, Chap. 12 in 3D Laser Microfabrication: Principles and Applications, ed. by H. Misawa, S. Joudkazis (Wiley, 2006)

    Google Scholar 

  16. S. Nolte, B.N. Chichkov, H. Welling, Y. Shani, K. Lieberman, H. Terkel, Opt. Lett. 24, 914 (1999)

    Article  ADS  Google Scholar 

  17. F. Korte, S. Adams, A. Egbert, C. Fallnich, A. Ostendorf, S. Nolte, M. Will, J.-P. Ruske, B.N. Chichkov, A. Tnnermann, Opt. Express 7, 41 (2000)

    Article  ADS  Google Scholar 

  18. S.-S. Wellershoff, J. Hohlfeld, J. Gdde, E. Matthias, Appl. Phys. A 69, S99 (1999)

    ADS  Google Scholar 

  19. P. Lorazo, L.J. Lewis, M. Meunier, Phys. Rev. Lett. 91, 225502 (2003)

    Article  ADS  Google Scholar 

  20. Z. Lin, L.V. Zhigilei, Phys. Rev. B 73, 184113 (2006)

    Article  ADS  Google Scholar 

  21. H.O. Jeschke, M.E. Garcia, M. Lenzner, J. Bonse, J. Krger, W. Kautek, Appl. Surf. Sci. 197–198, 839 (2002)

    Article  Google Scholar 

  22. N. Bulgakova, I.M. Bourakov, Appl. Surf. Sci. 197–198 (2002)

    Google Scholar 

  23. R. Kelly, A. Miotello, Phys. Rev. E 60, 2616 (1999) A. Miotello and R. Kelly, Appl. Phys. Lett. 67, 3535 (1995) A. Peterlongo, A. Miotello, and R. Kelly, Phys. Rev. E 50, 4716 (1994)

    Google Scholar 

  24. R. Stoian, A. Mermillod-Blondin, S.W. Winkler, A. Rosenfeld, I.V. Hertel, M. Spyridaki, E. Koudoumas, P. Tzanetakis, C. Fotakis, I.M. Burakov, N.M. Bulgakova, Opt. Eng. 44, 051106 (2005)

    Article  ADS  Google Scholar 

  25. P. Saeta, J.-K. Wang, Y. Siegal, N. Bloembergen, E. Mazur, Phys. Rev. Lett. 67, 1023 (1991)

    Article  ADS  Google Scholar 

  26. A.M. Lindenberg, S. Engemann, K.J. Gaffney, K. Sokolowski-Tinten, J. Larsson, D. Reis, P. Lorazo, J.B. Hastings, SPIE Proc. 7005, 700504 (2008)

    Article  Google Scholar 

  27. A. Lindenberg, S. Engemann, K. Gaffney, K. Sokolowski-Tinten, J. Larsson, P. Hillyard, D. Reis, D. Fritz, J. Arthur, R. Akre, M. George, A. Deb, P. Bucksbaum, J. Hajdu, D. Meyer, M. Nicoul, C. Blome, Th. Tschentscher, A. Cavalieri, R. Falcone, S. Lee, R. Pahl, J. Rudati, P. Fuoss, A. Nelson, P. Krejcik, D. Siddons, P. Lorazo, J. Hastings, Phys. Rev. Lett. 100, 135502 (2008)

    Article  ADS  Google Scholar 

  28. M. Ligges, I. Rajkovic, P. Zhou, O. Posth, C. Hassel, G. Dumpich, D. von der Linde, Appl. Phys. Lett. 94, 101910 (2009)

    Article  ADS  Google Scholar 

  29. S. Preuss, A. Demchuk, M. Stuke, Appl. Phys. A 61, 33 (1995)

    Article  ADS  Google Scholar 

  30. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou, Opt. Commun. 114, 106 (1995)

    Article  ADS  Google Scholar 

  31. C. Momma, B.N. Chichkov, S. Nolte, F. von Alvensleben, A. Tnnermann, H. Welling, Opt. Commun. 129, 134 (1996)

    Article  ADS  Google Scholar 

  32. B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, M.D. Perry, J. Opt. Soc. Am. B 13, 459 (1996)

    Article  ADS  Google Scholar 

  33. W. Kautek, J. Krger, M. Lenzner, S. Sartania, C. Spielmann, F. Krausz, Appl. Phys. Lett. 69, 3146 (1996)

    Article  ADS  Google Scholar 

  34. B. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tnnermann, Appl. Phys. A 63, 109 (1996)

    Article  ADS  Google Scholar 

  35. S. Nolte, C. Momma, H. Jacobs, A. Tnnermann, B.N. Chichkov, B. Wellegehausen, H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997)

    Article  ADS  Google Scholar 

  36. F. Korte, S. Nolte, B.N. Chichkov, T. Bauer, G. Kamlage, T.Wagner, C. Fallnich, H. Welling, Appl. Phys. A 69, S7 (1999)

    ADS  Google Scholar 

  37. N. Brsch, K. Krber, A. Ostendorf, K.H. Tnshoff, Appl. Phys. A 77, 237 (2003)

    ADS  Google Scholar 

  38. G. Kamlage, T. Bauer, A. Ostendorf, B.N. Chichkov, Appl. Phys. A 77, 307 (2003)

    ADS  Google Scholar 

  39. S. Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, W. Weaver, H. Champoux, Appl. Surf. Sci. 127–129, 875 (1998)

    Article  Google Scholar 

  40. R. Haight, D. Hayden, P. Longo, J. Vac. Sci. Technol. B 17, 3137 (1999)

    Article  Google Scholar 

  41. K. Ozono, M. Obara, A. Usui, H. Sunakawa, Opt. Commun. 189, 103 (2001)

    Article  ADS  Google Scholar 

  42. N.H. Rizvi, Riken Rev. 50, 107 (2003)

    Google Scholar 

  43. R. LeHarzic, N. Huot, E. Audouard, C. Jonin, P. Laporte, placeS. Valette, A. Fraczkiewicz, R. Fortunier, Appl. Phys. Lett. 80, 3886 (2002)

    Google Scholar 

  44. F. Garrelie, A.S. Loir, C. Donnet, F. Rogemont, R. LeHarzic, M. Belin, E. Audouard, F. Laporte, Surf. Coat. Technol. 163–164, 306 (2003)

    Article  Google Scholar 

  45. R. Eason, Pulsed Laser Deposition of Thin Films (Wiley, 2007)

    Google Scholar 

  46. F. Garrelie, C. Donnet, A.S. Loir, N. Benchikh, SPIE Proceedings 6261, 62610L (2006)

    Article  ADS  Google Scholar 

  47. K. Kawamura, N. Sarukura, M. Hirano, N. Ito and H. Hosono, Appl. Phys. Lett. 79, 1228–1130 (2001)

    Article  ADS  Google Scholar 

  48. J. Bonse, P. Rudolph, J. Krger, S. Baudach, W. Kautek, Appl. Surf. Sci. 154–155, 659 (2000)

    Article  Google Scholar 

  49. G. Dumitru, V. Romano, Y. Gerbig, H.P. Weber, H. Haefke, Appl. Phys. A 80, 283 (2005)

    Article  ADS  Google Scholar 

  50. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii, Opt. Lett. 26, 277 (2001)

    Article  ADS  Google Scholar 

  51. K. Minoshima, A.M. Kowalevicz, I. Hartl, E.P. Ippen, J.G. Fujimoto, Opt. Lett. 26, 1516 (2001)

    Article  ADS  Google Scholar 

  52. M. Masuda, K. Sugioka, Y. Cheng, T. Hongo, K. Shihoyama, H. Takai, placeI. Miyamoto, K. Midorikawa, Appl. Phys. A 78, 1029 (2004)

    Google Scholar 

  53. K. Miura, Jianrong Qiu, S. Fujiwara, S. Sakaguchi, K. Hirao, Appl. Phys. Lett. 80, 2263 (2002)

    Google Scholar 

  54. Ken-ichi Kawamura, Masahiro Hirano, Toshio Kamiya, Hideo Hosono, Appl. Phys. Lett. 81, 1137 (2002)

    Article  ADS  Google Scholar 

  55. F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, B.N. Chichkov, Appl. Phys. A 77, 229 (2003)

    ADS  Google Scholar 

  56. K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, K. Midorikawa, Appl. Phys. A 79, 815 (2004)

    Article  ADS  Google Scholar 

  57. K.M. Davis, K. Miura, placeN. Sugimoto, K. Hirao, Opt. Lett. 21, 1729 (1996)

    Google Scholar 

  58. S. Nolte, M. Will, J. Burghoff, A. Tuennermann, Appl. Phys. A 77, 109 (2003)

    Article  ADS  Google Scholar 

  59. R. Osellame,G. Della Valle, N. Chiodo, S. Taccheo, P. Laporta,O. Svelto, G. Cerullo, Appl. Phys. A 93, 17 (2008)

    Article  ADS  Google Scholar 

  60. L. Shah, A.Y. Arai, S.M. Eaton, P.R. Herman, Opt. Express 13, 1999 (2005)

    Article  ADS  Google Scholar 

  61. L. Li, J.T. Fourkas, Mater. Today 10, 30 (2007)

    Article  Google Scholar 

  62. J. Serbin, A. Egbert, A. Ostendorf, B.N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Frhlich, M. Popall, Opt. Lett. 28, 301 (2003)

    Article  ADS  Google Scholar 

  63. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama, Opt. Lett. 28, 1144 (2003)

    Article  ADS  Google Scholar 

  64. Fraunhofer-Institut fr Silicatforschung, Wuerzburg, Germany

    Google Scholar 

  65. J.-M Shieh, Z.-H. Chen, B.-T. Dai, Y.-C. Wang, A. Zaitsev, C.-L. Pan, Appl. Phys. Lett. 85, 1232 (2004)

    Google Scholar 

  66. J. Jia, M. Li, C.V. Thompson, Appl. Phys. Lett. 84, 3205 (2004)

    Article  ADS  Google Scholar 

  67. Y. Hosokawa, H. Takabayashi, S. Miura, C. Shukunami, Y. Hiraki, H. Masuhara, Appl. Phys. A 79, 795 (2004)

    Article  ADS  Google Scholar 

  68. W. Supatto, D. Dbarre, B. Moulia, E. Brouzs, J.-L. Martin, E. Farge, E. Beaurepaire, PNAS 102, 1047 (2005)

    Article  ADS  Google Scholar 

  69. A. Vogel, J. Noack, G. Httmann, G. Paltauf, Appl. Phys. B 81, 1015 (2005)

    Article  ADS  Google Scholar 

  70. A. Heisterkamp, I.Z. Maxwell, E. Mazur, J.M. Underwood, J.A. Nickerson, S. Kumar, D.E. Ingber, Opt. Express 13, 3690 (2005)

    Article  ADS  Google Scholar 

  71. K. Knig, O. Krauss, I. Riemann, Opt. Express 10, 171 (2002)

    ADS  Google Scholar 

  72. I. Zergioti, A. Karaiskou, D.G. Papazoglou, C. Fotakis, M. Kapsetaki, D. Kafetzopoulos, Appl. Phys. Lett. 86, 163902 (2005)

    Article  ADS  Google Scholar 

  73. K. Ozono, M. Obara, Appl. Phys. A 77, 303 (2003)

    ADS  Google Scholar 

  74. J. Serbin,T. Bauer, C. Fallnich, A. Kasenbacher, W.H. Arnold, Appl. Surf. Sci. 197–198, 737 (2002)

    Article  Google Scholar 

  75. S. Eliezer, N. Eliaz, E. Grossman, D. Fisher, I. Gouzman, Z. Henis, S. Pecker, Y. Horovitz, M. Fraenkel, S. Maman, Y. Lereah, Phys. Rev. B 69, 144119 (2004)

    Article  ADS  Google Scholar 

  76. Andrei V. Kabashin, Michel Meunier, Christopher Kingston, and John H.T. Luong, J. Phys. Chem. B 107, 4527 (2003)

    Google Scholar 

  77. A.V. Kabashin, M. Meunier, J. Appl. Phys. 94, 7941 (2003)

    Article  ADS  Google Scholar 

  78. S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, M. Vitiello X. Wang, G. Ausanio, V. Iannotti, L. Lanotte, Appl. Phys. Lett. 84, 4502 (2004)

    Google Scholar 

  79. R. Wagner, J. Gottmann, A. Horn, E.W. Kreutz, Appl. Surf. Sci. 252, 8576 (2006)

    Article  ADS  Google Scholar 

  80. N. Sanner, N. Huot, E. Audouard, C. Larat, J.-P. Huignard, Opt. Las. Eng. 45, 737 (2007)

    Article  Google Scholar 

  81. M. Zamfirescu, M. Ulmeanu, F. Jipa, O. Cretu, A. Moldovan, G. Epurescu, M. Dinescu, R. Dabu, J. Laser Micro/Nanoeng. 4, 7, 2009

    Article  Google Scholar 

  82. G.R.B.E. Rmer, A.J.Huis in’t Veld, J. Meijer, M.N.V. Groenendijk, CIRP Ann. Manufact. Technol. 58, 201 (2009)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Jürgen Reif .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2010 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Reif, J. (2010). Processing with Ultrashort Laser Pulses. In: Schaaf, P. (eds) Laser Processing of Materials. Springer Series in Materials Science, vol 139. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-13281-0_6

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-13281-0_6

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-13280-3

  • Online ISBN: 978-3-642-13281-0

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

Publish with us

Policies and ethics