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Design and Manufacturing of Active Microsystems pp 245–266Cite as

Micromachining of Parts for Microsystems

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Part of the book series: Microtechnology and MEMS ((MEMS))

Abstract

This article describes microgrinding processes for the machining of materials used in microsystems. An example of such microsystems is an air guide, which is used as an example for the presented machining processes. High workpiece surface qualities and shape accuracies are the aims in micromachining. To accomplish this, chemical vapor deposition (CVD) coated grinding wheels and pins, as well as multi-layered metal bonded grinding wheels, were developed and investigated, including novel dressing technology. In addition to conventional grinding processes, ultrasonic-assisted grinding is analyzed regarding the resulting surface quality. Microgrinding tools with CVD-coating were developed for structuring materials like glass, ceramics and cemented carbides. The influence of the process parameters and tool design on the workpiece quality is investigated. Finally, the micro-air guide was produced with different micromachining processes within the required tolerances. The investigated microgrinding processes with grinding pins enable the manufacturing of microholes with low chipping. Several microstructures can be machined in parallel when grinding with multiple microprofiled grinding wheels. Furthermore, dressed undercut geometries enable the grinding of perpendicular microstructure flanks.

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References

  1. Büttgenbach S (1994) Mikromechanik – Einführung in Technologie und Anwendung. B.G. Teubner, Stuttgart

    Google Scholar 

  2. Denkena B, Friemuth T, Reichstein M (2003) Potentials of different process kinematics in micro grinding. Annals of the CIRP 52(1):463–466

    Article  Google Scholar 

  3. Denkena B, Reichstein M, Hahmann D (2006) Electro contact discharge dressing for micro grinding. In: Proceedings of the 6th International conference of the euspen, pp 92–95

    Google Scholar 

  4. Denkena B, Hoffmeister HW, Hahmann D, Hlavac M (2007) Spanende Fertigungstechnik zur Herstellung von Mikrosystemen. Kolloquium Mikroproduktion, Forschungszentrum Karlsruhe

    Google Scholar 

  5. Denkena B, Hoffmeister HW, Li J, Bütefisch S, Reichstein M, Hlavac M, Hahmann D (2007) Entwicklung und Fertigung eines aerostatischen Mikrolagers mit mehreren Düsen. wt Werkstatttechnik online 3:120–125

    Google Scholar 

  6. Denkena B, Reichstein M, Hahmann D (2007) Dressing of filigree finegrained metal bonded grinding wheels. Production Engineering – Research and Development 1(3):239–243

    Google Scholar 

  7. Denkena B, Hoffmeister HW, Hahmann D, Hlavac M (2008) Machining of micro-systems. Microsystem Technologies 14(12):1909–1916

    Article  Google Scholar 

  8. Denkena B, de Leon L, Hahmann D (2008) Ultrasonic assisted grinding of brittle materials – surface topography and process forces. In: Proceedings of the 23rd Annual Meeting of the ASPE and the Twelfth ICPE, ASPE/ICPE, pp 384–387

    Google Scholar 

  9. Denkena B, Hoffmeister HW, Hahmann D, Wittmer R (2009) Optimierte Werkzeuge treiben die Mikrosystemtechnik voran. Maschinenmarkt 39:56–60

    Google Scholar 

  10. Denkena B, de Leon L, Hahmann D (2009) Dressing of micro profiles by wire electro discharge dressing. In: Proceedings of the 9th International conference of the euspen, pp 146–149

    Google Scholar 

  11. Denkena B, de Leon L, Hahmann D (2010) Grossflächiges Schleifen von Mikrostrukturen. wt werkstattstechnik online 100(H. 6):487–493

    Google Scholar 

  12. Denkena B, de Leon L, Hahmann D, Wang B (2010) Einsatz hochharter Schneidstoffe beim Schleifen. dihw – Diamant Hochleistungswerkzeuge 1/2010:36–43

    Google Scholar 

  13. Denkena B, de Leon L, Wang B, Krawczyk T (2010) Manufacturing of riblet-structures by profile grinding with metal bonded wheels. In: Proceedings of the 10th International conference of the euspen, vol 2, pp 295–298

    Google Scholar 

  14. Gäbler J, Schäfer L, Hoffmeister HW, Wenda A (1999) Development and application of cvd diamond micro tools for milling and grinding.In: Proceedings of the 1st International conference of the euspen, pp 434–437

    Google Scholar 

  15. Hesselbach J, ed (2002) mikroPRO – Untersuchung zum internationalen Stand der Mikroproduktionstechnik. Vulkan-Verlag, Essen

    Google Scholar 

  16. Hesselbach J, Hoffmeister HW, Hlavac M (2005) Micro-grinding – efficient technique for microstructuring hardened steels. Production Engineering – Research and Development 12(1):1–4

    Google Scholar 

  17. Hoffmeister HW, Hlavac M (2006) New drilling tools for the manufacturing of micro-holes in hard and brittle materials. In: Proceedings of the 6th International conference of the euspen, pp 256–259

    Google Scholar 

  18. Hoffmeister HW, Menze B (2004) Grinding and honing micro bores in hardened steels. In: Proceedings of the 4th International conference of the euspen, pp 205–206

    Google Scholar 

  19. Hoffmeister HW, Wittmer R (2009) Grinding hard and brittle materials with cvd-diamond microgrinding wheels. American Society for Precision Engineering

    Google Scholar 

  20. Hoffmeister HW, Wittmer R (2009) Verification of the process and wear behavior of cvd-diamond-microgrinding wheels by grinding hard and brittle materials. In: Proceedings of the 9th International conference of the euspen, pp 94–97

    Google Scholar 

  21. Hoffmeister HW, Gäbler J, Menze B, Sachers M, Schäfer L (2003) Micro abrasive pencils with cvd diamond coating. Diamond and Related Materials 12(Issues 3–7):707–710

    Google Scholar 

  22. Hoffmeister HW, Hlavac M, Gatzen HH, Morsbach C (2003) Mikrostrukturierung durch Schleifen. Abschlusskolloquium DFGSchwerpunktprogramm 1012 pp 39–54

    Google Scholar 

  23. Hoffmeister HW, Schäfer L, Gäbler J, Wittmer R (2010) Mikroschleifen mit CVD-Diamant-Schleifscheiben. Jahrbuch Schleifen, Honen, Läppen und Polieren pp 206–212

    Google Scholar 

  24. Klocke F, Lung D, Thomaidis D, Antonoglou G (2004) Using ultra thin electrodes to produce micro-parts with wire-edm. Journal of Materials Processing Technology 149(1):579–584

    Article  Google Scholar 

  25. Lierse T (1998) Mechanische und thermische Wirkungen beim Schleifen keramischer Werkstoffe. VDI-Verlag, Hannover

    Google Scholar 

  26. Meijer J, Du K, Gillner A, Hoffmann D, Kovalenko V, Masuzawa T, Ostendorf A, Poprawe R, Schulz W (2002) Laser machining by short and ultrashort pulses – state of the art and new opportunities in the age of the photons. Annals of the CIRP 51(2):531–550

    Article  Google Scholar 

  27. Okana K, Waida T, Suto T, Mizuno J, Kobayashi T (1993) Microgrinding of micromachine parts. Proceedings of the 1st International ABTEC Conference pp 100–105

    Google Scholar 

  28. Reichstein M (2008) Schleifen miniaturisierter Bauteile. Dissertation Universität Hannover, Hannover

    Google Scholar 

  29. Steinke ME, Kandlikar SG (2004) An experimental investigation of flow boiling characteristics of water in parallel microchannels. Journal of Heat Transfer 126(4):518–526

    Article  Google Scholar 

  30. Tönshoff H, Friemuth T, Reichstein M (2001) Ultra precision grinding of porous and non-porous super hard and brittle materials for components of micro systems. Annals of the German Academic Society for Production Engineering 8(1):21–24

    Google Scholar 

  31. Tönshoff H, Denkena B, Friemuth T, Reichstein M (2002) Precision grinding of components for active micro systems. Proceedings of the 3rd International Conference and 4th General Meeting of the euspen pp 803–806

    Google Scholar 

  32. Tönshoff H, Denkena B, Friemuth T, Reichstein M (2003) Precision grinding of components for aerostatic micro guidance. Precision Engineering 27(2):185–188

    Article  Google Scholar 

  33. Uhlmann E (1998) Surface formation in creep feed grinding of advanced ceramics with and without ultrasonic assistance. Annals of the CIRP 47(1):249–252

    Article  MathSciNet  Google Scholar 

  34. Uhlmann E, Piltz S, Doll U (2001) Electrical discharge grinding (edg) using microstructured disk electrodes. Production Engineering – Research and Development 8(1):25–30

    Google Scholar 

  35. Uhlmann E, Piltz S, Oberschmidt D (2008) Machining of micro rotational parts by wire electrical discharge grinding. Production Engineering – Research and Development 2(3):227–233

    Google Scholar 

  36. Weck M (2001) Ultraprecision machining of microcomponents. Proc International seminar on precision engineering and micro technology pp113–122

    Google Scholar 

  37. Weck M (2003) Mikromechanische Produktionstechnik. Abschlusskolloquium DFG-Schwerpunktprogramm 1012, Shaker-Verlag, Aachen

    Google Scholar 

  38. Wenda A (2002) Schleifen vonMikrostrukturen in sprödhartenWerkstoffen. Dissertation Technische Universität Braunschweig, Vulkan-Verlag, Essen

    Google Scholar 

  39. Xie J, Tamaki J, Kubo A, Iyama T (2001) Application of electro-contact discharge dressing to a fine-grained diamond grinding wheel. Journal of the Japan Society for Precision Engineering 67(11):1844–1549

    Google Scholar 

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Author information

Authors and Affiliations

  1. Institute of Production Engineering and Machine Tools, Leibniz Universität Hannover, Hanover, Germany

    B. Denkena

  2. Institute of Machine Tools and Production Technology, Technische Universität Braunschweig, Braunschweig, Gernany

    H.-W. Hoffmeister

Authors
  1. D. Hahmann
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  2. M. Rüggeberg
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  3. R. Wittmer
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  4. M. Reichstein
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  5. M. Hlavac
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  6. B. Denkena
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  7. H.-W. Hoffmeister
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Corresponding author

Correspondence to B. Denkena .

Editor information

Editors and Affiliations

  1. FB 7 Maschinenbau, LS Mikrotechnik, TU Braunschweig, Langer Kamp 8, Braunschweig, 38106, Germany

    Stephanus Büttgenbach

  2. Inst. Werkzeugmaschinen und, Fertigungstechnik, TU Braunschweig, Langer Kamp 19 B, Braunschweig, 38106, Germany

    Arne Burisch

  3. , Institut für Werkzeugmaschinen, Technische Universität Braunschweig, Langer Kamp 19B, Braunschweig, 38106, Germany

    Jürgen Hesselbach

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Hahmann, D. et al. (2011). Micromachining of Parts for Microsystems. In: Büttgenbach, S., Burisch, A., Hesselbach, J. (eds) Design and Manufacturing of Active Microsystems. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12903-2_14

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