Abstract
Electromagnetic coupling between devices in an microelectronic layout can become a serious design concern. In this paper, the problem of electromagnetic coupling is addressed from field computational point of view. Approximation schemes are justified by evaluating dimensionless parameters in the set up of the field equations and scale considerations of devices. The discretization scheme is reviewed and a simulation method is presented to compute the S-matrix directly by imposing boundary conditions that map directly to the experimental set up. An example demonstrates the validity of the scheme.
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Schoenmaker, W., Meuris, P., Pflanzl, W., Steinmair, A. (2010). Evaluation of Electromagnetic Coupling Between Microelectronic Device Structures Using Computational Electrodynamics. In: Roos, J., Costa, L. (eds) Scientific Computing in Electrical Engineering SCEE 2008. Mathematics in Industry(), vol 14. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12294-1_41
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DOI: https://doi.org/10.1007/978-3-642-12294-1_41
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