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Characteristics of Selected Materials

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Electromechanical Systems in Microtechnology and Mechatronics

Part of the book series: Microtechnology and MEMS ((MEMS))

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Abstract

Material Characteristics of Crystalline Quartz, Piezoelectric Constants of Sensor Materials, Characteristics of Metallic Structural Materials, Material Characteristics of Silicon and Passivation Layers, Comparison of Main Characteristics of Silicon, Silicon Dioxide and Silicone Nitride Layers

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References

  1. G. Gerlach;W. Dötzel. Grundlagen der Mikrosystemtechnik. Carl Hanser Verlag, München, 1997.

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  2. G. H. Gautschi.Piezoelectric Sensorics. Springer-Verlag, Berlin, Heidelberg, New York, 2002.

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  3. J. Mehner.Entwurf in der Mikrosystemtechnik. University Press, Band 9, Dresden, 2000.

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  4. G. Gerlach; W. Dötzel.Introduction of Microsystem Technology. JohnWiley & Sons, Ltd., West Sussex, 2008.

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  5. H. Kuttruff. Physik und Technik des Ultraschalls. Hirzel Verlag, Stuttgart, 1988.

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Author information

Authors and Affiliations

  1. Faculty of Electrical and Computer Engineering, Dresden University of Technology, Helmholtzstraße 10, 01069, Dresden, Germany

    Professor Dr.-Ing habil Arno Lenk & Professor Dr.-Ing habil Günther Pfeifer

  2. Karl Mayer Textile Machinery, Bruehlstr. 25, 63179, Obertshausen, Germany

    Dr.-Ing Rüdiger G. Ballas

  3. Darmstadt University of Technology, Institute for Electromechanical Design, Merckstr. 25, 64283, Darmstadt, Germany

    Professor Dr.-Ing habil Roland Werthschützky

Authors
  1. Professor Dr.-Ing habil Arno Lenk
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  2. Dr.-Ing Rüdiger G. Ballas
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  3. Professor Dr.-Ing habil Roland Werthschützky
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  4. Professor Dr.-Ing habil Günther Pfeifer
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© 2011 Springer-Verlag Berlin Heidelberg

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Lenk, A., Ballas, R.G., Werthschützky, R., Pfeifer, G. (2011). Characteristics of Selected Materials. In: Electromechanical Systems in Microtechnology and Mechatronics. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10806-8_11

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